JPH01171027U - - Google Patents

Info

Publication number
JPH01171027U
JPH01171027U JP1988068286U JP6828688U JPH01171027U JP H01171027 U JPH01171027 U JP H01171027U JP 1988068286 U JP1988068286 U JP 1988068286U JP 6828688 U JP6828688 U JP 6828688U JP H01171027 U JPH01171027 U JP H01171027U
Authority
JP
Japan
Prior art keywords
layer
thickness change
notch
wafer boat
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988068286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988068286U priority Critical patent/JPH01171027U/ja
Priority to KR1019880008741A priority patent/KR910007105B1/ko
Publication of JPH01171027U publication Critical patent/JPH01171027U/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P72/50—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1988068286U 1988-05-24 1988-05-24 Pending JPH01171027U (cg-RX-API-DMAC10.html)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1988068286U JPH01171027U (cg-RX-API-DMAC10.html) 1988-05-24 1988-05-24
KR1019880008741A KR910007105B1 (ko) 1988-05-24 1988-07-14 웨이퍼보드 반송용치구(治具)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988068286U JPH01171027U (cg-RX-API-DMAC10.html) 1988-05-24 1988-05-24

Publications (1)

Publication Number Publication Date
JPH01171027U true JPH01171027U (cg-RX-API-DMAC10.html) 1989-12-04

Family

ID=31293612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988068286U Pending JPH01171027U (cg-RX-API-DMAC10.html) 1988-05-24 1988-05-24

Country Status (2)

Country Link
JP (1) JPH01171027U (cg-RX-API-DMAC10.html)
KR (1) KR910007105B1 (cg-RX-API-DMAC10.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120319A (ja) * 1984-07-09 1986-01-29 Toshiba Ceramics Co Ltd 石英ガラス製ウエハボ−ト搬送治具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120319A (ja) * 1984-07-09 1986-01-29 Toshiba Ceramics Co Ltd 石英ガラス製ウエハボ−ト搬送治具

Also Published As

Publication number Publication date
KR910007105B1 (ko) 1991-09-18
KR890017792A (ko) 1989-12-18

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