JPH0117087Y2 - - Google Patents
Info
- Publication number
- JPH0117087Y2 JPH0117087Y2 JP13165582U JP13165582U JPH0117087Y2 JP H0117087 Y2 JPH0117087 Y2 JP H0117087Y2 JP 13165582 U JP13165582 U JP 13165582U JP 13165582 U JP13165582 U JP 13165582U JP H0117087 Y2 JPH0117087 Y2 JP H0117087Y2
- Authority
- JP
- Japan
- Prior art keywords
- antimony
- vacuum envelope
- ray fluorescence
- shield
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052787 antimony Inorganic materials 0.000 claims description 26
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 24
- 238000004876 x-ray fluorescence Methods 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 150000001462 antimony Chemical class 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Description
【考案の詳細な説明】
〔考案の技術分野〕
この考案はX線蛍光増倍管に係り、特にアンチ
モン遮蔽構造の改良に関する。[Detailed Description of the Invention] [Technical Field of the Invention] This invention relates to an X-ray fluorescence multiplier tube, and particularly relates to an improvement in an antimony shielding structure.
従来、X線蛍光増倍管は第1図に示すように構
成され、ガラス製真空外囲器1内の入力側には入
力面2が配設されている。この入力面2は金属製
リング3,4によつて保持され、このリング3,
4は真空外囲器1に埋設した端子5に支持されて
いる。又、上記真空外囲器1内の出力側には、加
速電極6、出力面7が配設されている。更に真空
外囲器1の側壁内面には、A等を真空蒸着する
ことにより、集束電極8が形成されている。
Conventionally, an X-ray fluorescence multiplier tube is constructed as shown in FIG. 1, and an input surface 2 is disposed on the input side of a vacuum envelope 1 made of glass. This input surface 2 is held by metal rings 3, 4, and these rings 3,
4 is supported by a terminal 5 embedded in the vacuum envelope 1. Further, on the output side of the vacuum envelope 1, an accelerating electrode 6 and an output surface 7 are arranged. Furthermore, a focusing electrode 8 is formed on the inner surface of the side wall of the vacuum envelope 1 by vacuum evaporating A or the like.
上記入力面2の内面には、アンチモンを蒸着し
て光電面を形成するが、このため真空外囲器1の
後部にはアンチモン蒸発源9が設けられている。
ところで、アンチモン蒸発源9から蒸発したアン
チモンは、入力面2を含むその近辺にも付着し、
その結果、集束電極8と端子5とが導通して集束
できなくなる。そこで従来、導通を防ぐために、
入力面2の近くに略筒状のアンチモン遮蔽体10
が設けられている。 On the inner surface of the input surface 2, antimony is deposited to form a photocathode. For this purpose, an antimony evaporation source 9 is provided at the rear of the vacuum envelope 1.
By the way, antimony evaporated from the antimony evaporation source 9 also adheres to the vicinity including the input surface 2.
As a result, the focusing electrode 8 and the terminal 5 are electrically connected, making it impossible to focus. Therefore, in order to prevent conduction, conventionally,
A substantially cylindrical antimony shield 10 is provided near the input surface 2.
is provided.
上記アンチモン遮蔽体10は、一般に絞り加工
によつて略筒状に成形されているが、アンチモン
遮蔽体10はできるだけ真空外囲器1の内壁に密
着させた方が中心ずれが無視でき、電子レンズへ
の影響が少なくなる。しかし、脱ガス工程での昇
温で膨張して、真空外囲器1を傷つけることがあ
り好ましくない。又、従来のアンチモン遮蔽体1
0は絞り加工のため、極めて高価である。
The antimony shield 10 is generally formed into a substantially cylindrical shape by drawing, but if the antimony shield 10 is brought into close contact with the inner wall of the vacuum envelope 1 as much as possible, the center shift can be ignored, and the electron lens The impact on However, the vacuum envelope 1 may be damaged due to expansion due to temperature rise in the degassing process, which is not preferable. Moreover, the conventional antimony shielding body 1
0 is extremely expensive because it involves drawing.
この考案の目的は、集束電界を乱す恐れが少な
く、且つ組立容易にして、真空外囲器への熱歪の
悪影響を抑制したX線蛍光増倍管を提供すること
である。
The purpose of this invention is to provide an X-ray fluorescence multiplier tube that is less likely to disturb the focusing electric field, is easy to assemble, and suppresses the adverse effects of thermal strain on the vacuum envelope.
この考案は、ガラス製真空外囲器内の入力側に
入力面を出力側に加速電極及び出力面をそれぞれ
設け、更に真空外囲器の側壁内面に集束電極を形
成し、且つ真空外囲器の後部にアンチモン蒸発源
を設けたX線蛍光増倍管において、
上記入力面の近くに金属ワイヤからなるアンチ
モン遮蔽体を上記真空外囲器の内面に密着して一
周させたX線蛍光増倍管である。
This idea consists of providing an input surface on the input side and an accelerating electrode and an output surface on the output side of the glass vacuum envelope, and further forming a focusing electrode on the inner surface of the side wall of the vacuum envelope. In an X-ray fluorescence multiplier tube with an antimony evaporation source installed at the rear of the tube, an antimony shield made of metal wire is placed close to the input surface and wrapped around the inner surface of the vacuum envelope. It's a tube.
この考案のX線蛍光増倍管は第2図及び第3図
に示すように構成され、従来例と同一箇所は同一
符号を付すことにする。即ち、真空外囲器1内に
は、入力面2の近くにアンチモン遮蔽体11が配
設されている。このアンチモン遮蔽体11は直径
1mmの金属ワイヤからなり、真空外囲器1の内面
に接して一周している。そして、第3図aに示す
ように、このアンチモン遮蔽体11は数箇所で支
持片12に支持されると共に真空外囲器1内面に
押圧されている。而も、支持片12の一端の折曲
部12aはアンチモン遮蔽体11とスポツト溶接
により固定されている。又、支持片12の他端は
真空外囲器1に取付けた端子13にナツト14に
より固定されている。便宜上、第2図では第3図
に示した支持片12や端子13、ナツト14等は
省略した。
The X-ray fluorescence intensifier tube of this invention is constructed as shown in FIGS. 2 and 3, and the same parts as in the conventional example are given the same reference numerals. That is, an antimony shield 11 is disposed within the vacuum envelope 1 near the input surface 2. This antimony shield 11 is made of a metal wire with a diameter of 1 mm, and extends around the inner surface of the vacuum envelope 1 in contact with the inner surface. As shown in FIG. 3a, this antimony shield 11 is supported by support pieces 12 at several locations and is pressed against the inner surface of the vacuum envelope 1. Furthermore, the bent portion 12a at one end of the support piece 12 is fixed to the antimony shield 11 by spot welding. The other end of the support piece 12 is fixed to a terminal 13 attached to the vacuum envelope 1 with a nut 14. For convenience, the support piece 12, terminal 13, nut 14, etc. shown in FIG. 3 are omitted in FIG. 2.
尚、上記金属ワイヤからなるアンチモン遮蔽体
11によるアンチモンの遮蔽された影は、2mm以
上の幅があれば十分であることが判つている。 It has been found that it is sufficient for the shadow of antimony shielded by the antimony shielding body 11 made of the metal wire to have a width of 2 mm or more.
又、この考案のX線蛍光増倍管は、上記以外は
従来例(第1図)と同様構成ゆえ、詳細な説明は
省略する。 Moreover, since the X-ray fluorescence intensifier tube of this invention has the same structure as the conventional example (FIG. 1) except for the above, detailed explanation will be omitted.
この考案によれば、アンチモン遮蔽体11は真
空外囲器1内壁に接して設けられているため、蒸
着されたアンチモン層が入力面2近くの全周で確
実に切れて電気絶縁が保たれる。この結果、集束
電界を乱す恐れが少なく、電子レンズへの影響が
減少され、収差による解像度低下もなくなる。
又、絞り加工による従来のアンチモン遮蔽体10
に比べて、この考案のアンチモン遮蔽体11は極
めて安価である。更にこの考案では、組立容易に
して、且つ真空外囲器1への熱歪の悪影響を抑制
することができる。
According to this invention, since the antimony shield 11 is provided in contact with the inner wall of the vacuum envelope 1, the vapor-deposited antimony layer is reliably cut around the entire circumference near the input surface 2, and electrical insulation is maintained. . As a result, there is less possibility of disturbing the focusing electric field, the influence on the electron lens is reduced, and there is no reduction in resolution due to aberrations.
Moreover, the conventional antimony shielding body 10 by drawing process
Compared to this, the antimony shield 11 of this invention is extremely inexpensive. Furthermore, with this invention, assembly can be facilitated and the adverse effects of thermal strain on the vacuum envelope 1 can be suppressed.
第1図は従来のX線蛍光増倍管を示す断面図、
第2図はこの考案の一実施例に係るX線蛍光増倍
管の要部を示す断面図、第3図a,bは第2図に
おけるアンチモン遮蔽体を支持する構造を示す断
面図と斜視図である。
1……真空外囲器、2……入力面、6……加速
電極、7……出力面、8……集束電極、9……ア
ンチモン蒸発源、11……アンチモン遮蔽体、1
2……支持片、13……端子、14……ナツト。
Figure 1 is a cross-sectional view of a conventional X-ray fluorescence intensifier.
FIG. 2 is a sectional view showing the main parts of an X-ray fluorescence multiplier according to an embodiment of this invention, and FIGS. 3 a and 3 b are sectional views and perspective views showing the structure that supports the antimony shield in FIG. 2. It is a diagram. DESCRIPTION OF SYMBOLS 1... Vacuum envelope, 2... Input surface, 6... Accelerating electrode, 7... Output surface, 8... Focusing electrode, 9... Antimony evaporation source, 11... Antimony shield, 1
2... Support piece, 13... Terminal, 14... Nut.
Claims (1)
側に加速電極及び出力面をそれぞれ設け、更に真
空外囲器の側壁内面に集束電極を形成し、且つ真
空外囲器の後部にアンチモン蒸着源を設けたX線
蛍光増倍管において、 上記入力面の近くに金属ワイヤからなるアンチ
モン遮蔽体を上記真空外囲器の内面に密着して一
周させたことを特徴とするX線蛍光増倍管。[Scope of Claim for Utility Model Registration] An input surface is provided on the input side of a glass vacuum envelope, and an acceleration electrode and an output surface are provided on the output side, and a focusing electrode is further formed on the inner surface of the side wall of the vacuum envelope, and In an X-ray fluorescence multiplier tube in which an antimony deposition source is provided at the rear of the vacuum envelope, an antimony shield made of metal wire is placed close to the input surface and goes around the inner surface of the vacuum envelope. An X-ray fluorescence intensifier tube characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13165582U JPS5936155U (en) | 1982-08-31 | 1982-08-31 | X-ray fluorescence multiplier tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13165582U JPS5936155U (en) | 1982-08-31 | 1982-08-31 | X-ray fluorescence multiplier tube |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5936155U JPS5936155U (en) | 1984-03-07 |
JPH0117087Y2 true JPH0117087Y2 (en) | 1989-05-18 |
Family
ID=30297568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13165582U Granted JPS5936155U (en) | 1982-08-31 | 1982-08-31 | X-ray fluorescence multiplier tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5936155U (en) |
-
1982
- 1982-08-31 JP JP13165582U patent/JPS5936155U/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5936155U (en) | 1984-03-07 |
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