JPH01170589A - Laser beam machine - Google Patents

Laser beam machine

Info

Publication number
JPH01170589A
JPH01170589A JP62330946A JP33094687A JPH01170589A JP H01170589 A JPH01170589 A JP H01170589A JP 62330946 A JP62330946 A JP 62330946A JP 33094687 A JP33094687 A JP 33094687A JP H01170589 A JPH01170589 A JP H01170589A
Authority
JP
Japan
Prior art keywords
gap
command
gap holding
rapid traverse
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62330946A
Other languages
Japanese (ja)
Inventor
Masayuki Kanbara
雅之 管原
Hirohisa Segawa
瀬川 博久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62330946A priority Critical patent/JPH01170589A/en
Publication of JPH01170589A publication Critical patent/JPH01170589A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a safe laser beam machine which can be easily operated by providing a means to store a gap holding command, a means to decide whether or not a moving command is rapid traverse and a gate means to check passing of the gap holding command during the rapid traverse mode. CONSTITUTION:The gap holding command storage means 17 stores a gap holding command signal to command to hold an inputted gap L between a nozzle end 1a of a machining head and the surface of material 7 to be machined at a set value and continues to output said signal. On the other hand, the rapid traverse decision means 18 discriminates whether the moving command to move the machining head relatively to the material to be machined is the rapid traverse mode or the ordinary mode. The gate means 19 is controlled by an output signal of said rapid traverse decision means 18 and checks passing of the gap holding command signal outputted by said gap holding command storage means 17 during a period of time of the rapid traverse mode of said mobile command. By this method, since a function to hold said gap at the set value is stopped automatically, the safe laser beam machine which is easily operated can be obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明はレーザの集光位tTh被加工物表面上の最適
位量に保持する制御機能を有すレーザ加工機に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a laser processing machine having a control function to maintain the laser focal point tTh at an optimum amount on the surface of a workpiece.

〔従来の技術〕[Conventional technology]

被加工物のレーザ加工に際し、レーザの集光位tFを上
記被加工物の表面状態に関係なく、この被加工物の表面
上の最適位置Eζ保持しながら加工するレーザ加工機と
しては特開昭59−223189号公報に示されたもの
が知られている。
When processing a workpiece with a laser, JP-A-Sho is a laser processing machine that maintains the laser focusing position tF at the optimum position Eζ on the surface of the workpiece, regardless of the surface condition of the workpiece. One disclosed in Japanese Patent No. 59-223189 is known.

第3図は上記特開昭59−223188号公報に示され
た従来のレーザ加工機の加工ヘッドとその制御回路のブ
ロックを示した図である。図において。
FIG. 3 is a block diagram showing a processing head and its control circuit of a conventional laser processing machine disclosed in the above-mentioned Japanese Patent Laid-Open No. 59-223188. In fig.

(1)は加工ヘッドであff、(1&)はレーザ出射口
であるノズル端、(11))dアシストガス注入口、(
2)は上記加工ヘッドfilにレーザ光(D)を導く導
光部、(3)は集光レンズ、(4)は加工ヘッド(1)
ヲ矢印A方向に移動させる駆動機構で、サーボモータ(
5)および調整ネジ(6)から構成されている。(7)
は加工テーブル(7)上に載置された平板状の被加工物
、α2はこの被加工物(7)と上記加工ヘッド(1)の
ノズル端(1a)間の間隙りを測定する距離センサ、 
<131は比較手段、Iは上記サーボモータ(4)を制
御駆動するサーボモータ駆動手段である。
(1) is the processing head, (1 &) is the nozzle end which is the laser emission port, (11)) d is the assist gas inlet, (
2) is a light guiding part that guides the laser beam (D) to the processing head fil, (3) is a condensing lens, and (4) is a processing head (1).
A drive mechanism that moves in the direction of arrow A, driven by a servo motor (
5) and an adjustment screw (6). (7)
α2 is a flat workpiece placed on the processing table (7), and α2 is a distance sensor that measures the gap between the workpiece (7) and the nozzle end (1a) of the processing head (1). ,
<131 is a comparison means, and I is a servo motor driving means for controlling and driving the servo motor (4).

次に動作について説明する。レーザ光(DIVi、加工
ヘッド(1)に設けられた集光レンズ(3)により被加
工物(7)に集光照射される。このレーザの集光位置F
はレーザ加工に際し例えば被加工物(7)の表面等。
Next, the operation will be explained. Laser light (DIVi) is condensed and irradiated onto the workpiece (7) by a condensing lens (3) provided on the processing head (1).The condensing position F of this laser
is, for example, the surface of the workpiece (7) during laser processing.

被加工物(7)に対し一定の位置Cζ保持されることが
加工8費を確保する上で重要である このため。
For this reason, it is important to maintain a constant position Cζ with respect to the workpiece (7) in order to secure machining costs.

距離センサ側は上記被加工物(7)上のレーザ集光位置
Fの代シに上記加工ヘッド(1)のノズル端(1a)と
上記被加工物(7)間の間隙りを測定し、比較手段fi
3が上記距離センサ側の出力信号■と端子(13すから
入力されている信号v□ を比較してその差の信号Δ■
を出力し、サーボモータ駆動手段Iは上記比較手段q3
の出力信号ΔVが零となるようにサーボモータ(5)を
制御駆動し、このサーボモータ(5)と調整ネジ(6)
からなる駆動機構(4)fζよシ上記加工ヘッド(1)
を矢印A方向に移動させることにより。
The distance sensor side measures the gap between the nozzle end (1a) of the processing head (1) and the workpiece (7) in place of the laser focusing position F on the workpiece (7), comparison means fi
3 compares the output signal ■ from the distance sensor side mentioned above and the signal v□ input from the terminal (13), and outputs the difference signal Δ■
The servo motor drive means I outputs the above comparison means q3.
The servo motor (5) is controlled and driven so that the output signal ΔV becomes zero, and the servo motor (5) and adjustment screw (6)
The drive mechanism (4) consisting of fζ and the processing head (1)
By moving in the direction of arrow A.

上記間隙りが設定値LQになるように自動制御する。従
って、加工テーブル(8)を例えば矢印B方向に移動さ
せることlζよシ、滑かな凹凸を有す上記被加工物(7
)が移動しても、上記間隙りは常に設定値LQ に保持
される。
Automatic control is performed so that the gap becomes the set value LQ. Therefore, instead of moving the processing table (8) in the direction of arrow B, for example, the workpiece (7) having smooth unevenness is
) moves, the gap is always maintained at the set value LQ.

しかし2位置決め等で加工ヘッド(1)を相対的に早送
りする場合、すなわち、第3図において加工テーブル(
8)を矢印B方向に早送シする場合Eζおいて、被加工
物(7)のすでに切断し、穴のあいた部分の上を通過す
る場合があや、この場合、上記間隙りを一定値LQ に
保持する制御機能Cζよシ、上記加工ヘッド(1)は矢
印Aの下方向Cζ降下して穴の部分Eζはい九被加工物
(7)と衝突してしまう危険がある。この危険防止のた
め、一般には制御機能の作用を停止させるスイッチ手段
(図示せず)を設け、上記加工ヘッド(1)の相対的な
早送シ時には上記制御機能が働かないようにしている。
However, when the machining head (1) is moved relatively quickly for 2-positioning, etc., in other words, the machining table (
8) in the direction of arrow B, there is a case where Eζ passes over a part of the workpiece (7) that has already been cut and has a hole.In this case, the gap is set to a constant value LQ. Due to the control function Cζ maintained at Cζ, there is a risk that the processing head (1) descends in the downward direction Cζ of the arrow A and collides with the workpiece (7) at the hole portion Eζ. In order to prevent this danger, a switch means (not shown) is generally provided to stop the operation of the control function, so that the control function does not operate during relative rapid movement of the processing head (1).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

加工ヘッド(1)のノズル端(1a)と被加工物(7)
間の間隙りを一定lζ保持する制御機能をスイッチ手段
により人、切させるように構成された従来のレープ加工
機においては、上記加工ヘッドを被加工物に対して相対
的に早送りするときには上記間隙りを設定値LQに保持
する自動制御機能を上記スイッチ手段の切動作によシ停
止させねばならず。
Nozzle end (1a) of processing head (1) and workpiece (7)
In a conventional rapping machine, in which a control function for maintaining a constant gap lζ is manually turned off by a switch means, when the machining head is rapidly moved relative to the workpiece, the gap The automatic control function that maintains the temperature at the set value LQ must be stopped by turning off the switch means.

この切動作を忘れると加工ヘッドを破損させる危険があ
るという問題点があった。
There is a problem in that if this cutting action is forgotten, there is a risk of damaging the processing head.

この発明は上記のような問題点を解消するためになされ
たもので、加工ヘッドを加工テーブルに対して相対的C
ζ早送シする期間中は上記加工ヘッドのノズル端と被加
工物間の間隙りを設定値に保持する自動制御機能を自動
的に停止させることができる安全なレーザ加工機を得る
ことを目的とする。
This invention was made to solve the above-mentioned problems.
ζThe objective is to obtain a safe laser processing machine that can automatically stop the automatic control function that maintains the gap between the nozzle end of the processing head and the workpiece at the set value during the period of rapid forwarding. shall be.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係るレーザ加工機は間隙保持指令および移動
指令の入力によシ、加工ヘッドがそのノズル先端と被加
工物間の間隙を設定値に保持しながら上記被加工物の表
面上を相対的に移動するようEζしたものにおいて、上
記間隙保持指令を記憶する間隙保持指令記憶手段と、上
記移動指令が早送りモードか否かを判別する早送り判定
手段と。
In the laser processing machine according to the present invention, upon input of a gap maintenance command and a movement command, the processing head moves relatively over the surface of the workpiece while maintaining the gap between the nozzle tip and the workpiece at a set value. and a gap holding command storage means for storing the gap holding command, and a fast forward determination means for determining whether or not the movement command is in a fast forward mode.

この早送り判定手段の出力信号で制御され上記移動指令
が早送シモードである期間中は上記間隙保持指令記憶手
段からの間隙保持を指令する出力信号を通過させないゲ
ート手段とを備えたものである。
Gate means is controlled by the output signal of the fast-forward determining means and does not allow an output signal instructing gap maintenance from the gap-maintaining command storage means to pass during a period in which the movement command is in the fast-forward mode.

〔作用〕[Effect]

この発明における間隙保持指令記憶手段は入力された加
工ヘッドのノズル端と被加工物表面間の間隙を設定値に
保持することを指令する間隙保持指令信号を記憶して、
この信号の出力を継続するが、一方早送シ判定手段は加
工ヘッドを被加工物に対して相対的に移動させる移動指
令が早送シモードか通常モードかを判別し、ゲート手段
は上記早送夛判定手段の出力信号によシ制御され、上記
移動指令が早送シモードである期間中は上記間隙保持指
令記憶手段が出力する間隙保持指令信号の通過を阻止す
る。
The gap holding command storage means in this invention stores the input gap holding command signal instructing to maintain the gap between the nozzle end of the processing head and the surface of the workpiece at a set value,
This signal continues to be output, but on the other hand, the rapid traverse determination means determines whether the movement command for moving the machining head relative to the workpiece is the rapid traverse mode or the normal mode, and the gate means It is controlled by the output signal of the gap determining means to prevent passage of the gap holding command signal output from the gap holding command storage means during the period when the movement command is in the fast forward mode.

〔発明の実施例〕[Embodiments of the invention]

以下、この発明の一実施例を図について説明する。図中
、従来のものと同一符号で表わしたものは従来例のそれ
と同一、もしくは従来例に相当するものである。
An embodiment of the present invention will be described below with reference to the drawings. In the drawings, parts denoted by the same reference numerals as those of the conventional example are the same as those of the conventional example or correspond to the conventional example.

第1図はこの実施例のレーザ加工機の加工ヘッド部分と
加工テーブルおよびこれ等の制御回路のブロックを示す
図である。図において、(9)は加工テーブル(8)を
矢印B方向に移動させる駆動機構を構成するサーボモー
タ、 (IQはこのサーボモータ(9)を制御駆動する
サーボモータ駆動手段である。上記加工ヘッド(1)を
加工テーブル(8)のXY平面上を相対的に任意に移動
可能とするために、上記加工ヘッド(1)を紙面に面直
する方向に制御駆動する1組の駆動機構とサーボモータ
駆動手段が存在するが記載を省略している。α9は加工
ヘッド(1)のノズル端(1a)と被加工物間の間隙り
を設定値に保持するようfζ制御する間隙制御手段であ
)、比較手段αjおよびサーボモータ駆動手段(14a
)から構成されている。この間隙制御手段なυ、上記間
隙りを計測する距離センサ1121.およびサーボモー
タ(5)と調整ネジ(6)からなる駆動機構(4)にょ
シ上記間隙りを設定値に保持するように自動制御する負
帰還制御系を構成する。(LDは上記間隙制御手段αυ
による間隙りの設定値Iζ保持する自動制御全指令する
間隙保持指令信号を記憶して継続した信号を出力する間
隙保持指令記憶手段、fi秒は早送シ判定手段であり、
端子α9から入力された加工ヘッド(1)を被加工物(
7)すなわち加工テーブル(8)に対して相対的に移動
させる移動指令を上記サーボモータ駆動手段α1が解析
し、上記早送シ判定手段はこの解析された移動コードが
早送シモードか否かを判別して早送カモードである場合
に信号を出力するものである。α9社上記早送シ判別手
段(IIの出力信号によシ制御されるゲート手段であや
2通常に導通状態Eζあり、上記早送り判別手段a・よ
シ早送!llを示す制御信号の入力Iこよシネ導通とな
シ、上記間隙保持記憶手段αnから出力される上記間隙
乙の間隙保持指令信号が上記加工ヘッド(1)の間隙制
御手段(11)に入力されるのを阻止するものである。
FIG. 1 is a block diagram showing a processing head portion, a processing table, and a control circuit thereof of a laser processing machine according to this embodiment. In the figure, (9) is a servo motor that constitutes a drive mechanism that moves the processing table (8) in the direction of arrow B, (IQ is a servo motor drive means that controls and drives this servo motor (9). The processing head mentioned above In order to enable the processing head (1) to move relatively arbitrarily on the XY plane of the processing table (8), a set of drive mechanisms and servos are provided to control and drive the processing head (1) in a direction perpendicular to the plane of the paper. Although there is a motor drive means, its description is omitted. α9 is a gap control means that controls fζ to maintain the gap between the nozzle end (1a) of the processing head (1) and the workpiece at a set value. ), comparison means αj and servo motor drive means (14a
). This gap control means υ is a distance sensor 1121 that measures the gap. A drive mechanism (4) comprising a servo motor (5) and an adjustment screw (6) constitutes a negative feedback control system that automatically controls the gap to maintain it at a set value. (LD is the gap control means αυ
gap holding command storage means for storing a gap holding command signal for all automatic control commands to hold the set value Iζ of the gap according to the above, and outputting a continuous signal; fi seconds is a fast forward judgment means;
The processing head (1) input from terminal α9 is connected to the workpiece (
7) In other words, the servo motor drive means α1 analyzes the movement command to move relative to the processing table (8), and the rapid traverse determination means determines whether or not the analyzed movement code is in the rapid traverse mode. It determines and outputs a signal when it is in fast forward mode. The gate means controlled by the output signal of α9 company's fast-forward discrimination means (II) inputs a control signal indicating that A2 is normally in a conductive state Eζ, and that the fast-forward discrimination means a and fast-forward! This is to prevent the gap holding command signal for the gap B outputted from the gap holding storage means αn from being input to the gap control means (11) of the processing head (1) when the cine conduction occurs. .

第2図は上記制御回路の動作を示すフロー図であり、以
下この図によシこの制御回路の動作を説明する。まず加
工ヘッド(1)のノズル端(1a)と被加工物())の
表面間の間隙りを設定値に保持する制御を間隙制御手段
αυにより行なうことを指示する間隙保持指令信号が端
子(1b)から入力されると(ステップ101L間隙保
持指令記憶手段αηは上記間隙保持指令信号を記憶して
この信号を継続して出力する(ステップ102)、この
間隙保持指令信号の出力は上記間隙保持指令記憶手段α
Dにリセット信号が入力されるまで継続する。−万端子
α9から入力された上記加工ヘッド(1)と加工テーブ
ル(8)の相対的な移動を指令する移動指令信号をサー
ボモータ駆動手段部が解読し、早送9判定手段a♂が上
記移動が早送シモードtζよるものか2通常モードによ
るものかを判定しくステップ103)。
FIG. 2 is a flow diagram showing the operation of the control circuit, and the operation of the control circuit will be explained below with reference to this figure. First, a gap maintenance command signal is sent to the terminal ( 1b) (Step 101L) The gap maintenance command storage means αη stores the gap maintenance command signal and continuously outputs this signal (step 102), the output of this gap maintenance command signal is Command storage means α
This continues until a reset signal is input to D. - The servo motor driving means section decodes the movement command signal inputted from the million terminal α9, which instructs the relative movement of the processing head (1) and the processing table (8), and the fast forward 9 judgment means a♂ It is determined whether the movement is due to the fast forward mode tζ or the 2 normal mode (step 103).

この早送シ判定手段Uの出力信号で制御されるゲート手
段fi9は上記早送シ判定手段Uの出力信号がOFF、
すなわち通常モードの場合には導通(ON)となり(ス
テップ104)、上記間隙保持指令記憶手段(lDの出
力信号は上記ゲート手段σ9を介して制御手段α旧ζ入
力され、上記間隙りを設定値lζ保持するように自動制
御がなされるが、上記早送り判定手段aSの出力信号が
ON、すなわち早送シモードの場合Eζは非導通(OF
F)となジ(ステップ1θ5)、上記間隙保持指令記憶
手段卸の出力信号は上記ゲート手段a9によシ導通を阻
止されるので、上記間隙制御手段(11) Kよる上記
間隙I4−設定値に保持する自動制御が停止され9代り
に別途入力される移動指令によシ1例えば矢印Aの上方
向へ待避のための移動等を行なう。すなわち。
The gate means fi9, which is controlled by the output signal of the fast-forward determination means U, operates when the output signal of the fast-forward determination means U is OFF;
That is, in the case of the normal mode, it becomes conductive (ON) (step 104), and the output signal of the gap maintenance command storage device (LD) is inputted to the control device α and ζ via the gate device σ9, and the gap is set to the set value. Automatic control is performed to maintain lζ, but when the output signal of the fast-forward determining means aS is ON, that is, in the fast-forward mode, Eζ becomes non-conductive (OF
F) Then (step 1θ5), the output signal of the gap holding command storage means is prevented from conducting by the gate means a9, so that the gap I4-set value by the gap control means (11) K is The automatic control maintained at 9 is stopped, and 1 is moved, for example, in the upward direction of arrow A for evacuation, in response to a movement command input separately. Namely.

間隙保持指令に基いて上記間隙りを設定値に保持する自
動制御モードに選定されていても、移動指令が早送りモ
ードである期間中は上記間隙制御手段αDの上記間隙り
の設定値lζ保持する制御機能が自動的fζ停止される
Even if the automatic control mode is selected in which the gap is maintained at the set value based on the gap maintenance command, the set value lζ of the gap of the gap control means αD is maintained during the period when the movement command is in the fast forward mode. The control function is automatically stopped fζ.

なお、上記実施例では2次元のレーザ加工機で説明した
が、立体形状を加工する3次元レーザ加工機でも同様な
効果を奏する。
Although the above embodiment has been described using a two-dimensional laser processing machine, a three-dimensional laser processing machine that processes three-dimensional shapes can also produce similar effects.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、移動指令が早送シモー
ドカ)否かを判別する早送ジ判定手段の出力によシ制御
されるゲート手段が上記移動指令が早送シモードである
期間中は加工ヘッドのノズル端と被加工物間の間隙を設
定値に保持させる間隙保持指令の通過を阻止して上記間
隙を設定値に保持する機能を自動的に停止させるように
したので操作が簡単で安全なレーザ加工機が得られる効
果がある。
As described above, according to the present invention, the gate means controlled by the output of the fast-forward determination means for determining whether or not the movement command is in the fast-forward mode is activated during the period in which the movement command is in the fast-forward mode. The function that maintains the gap between the nozzle end of the processing head and the workpiece at the set value is automatically stopped by preventing passage of the gap hold command that maintains the gap between the nozzle end of the processing head and the workpiece at the set value, making the operation easy. This has the effect of providing a safe laser processing machine.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例によるレーザ加工機の加工
ヘッドおよび加工テーブルとこれ等の制御回路の関係を
含めて概略的Iζ示すブロック図。 第2図は第1図に示した制御回路の動作を示すフロー図
、第3図は従来のレーザ加工機の加工ヘッドとその制御
回路の関係を概略的に示すブロック図である。 図1ζおいて、(1)は加工ヘッド、 (Ia)は加工
ヘッドノズル端、(3)は集光レンズ、(4)は駆動機
構、(5)(9)はサーボモータ、(7)は被加工物、
(8)は加工テープA’、 (IQ、  (14a)は
サーボ−モータ駆動手段、Uは間隙制御手段、住りは距
離センサ、 ti3は比較手段。 αηは間隙保持指令記憶手段、αgは早送夛判定手段。 α3はゲート手段である。 なお2図中、同一符号は同一、又は相当部分を示す。
FIG. 1 is a block diagram schematically showing the relationship between a processing head and a processing table of a laser processing machine according to an embodiment of the present invention, and their control circuits. FIG. 2 is a flow diagram showing the operation of the control circuit shown in FIG. 1, and FIG. 3 is a block diagram schematically showing the relationship between the processing head of a conventional laser processing machine and its control circuit. In Figure 1ζ, (1) is the processing head, (Ia) is the nozzle end of the processing head, (3) is the condenser lens, (4) is the drive mechanism, (5) and (9) are the servo motors, and (7) is the workpiece,
(8) is processing tape A', (IQ), (14a) is servo-motor drive means, U is gap control means, housing is distance sensor, ti3 is comparison means, αη is gap holding command storage means, αg is fast Feedback determination means. α3 is gate means. In the two figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] 間隙保持指令および移動指令の入力により、加工ヘッド
がそのノズル先端と被加工物間の間隙を設定値に保持し
ながら上記被加工物の表面上を相対的に移動するように
したものにおいて、上記間隙保持指令を記憶する間隙保
持指令記憶手段、上記移動指令が早送りモードか否かを
判別する早送り判定手段、この早送り判定手段の出力信
号で制御され上記移動指令が早送りモードである期間中
は上記間隙保持指令記憶手段からの間隙保持を指令する
出力信号を通過させないゲート手段を備えたことを特徴
とするレーザ加工機。
The processing head is configured to move relatively over the surface of the workpiece while maintaining the gap between the nozzle tip and the workpiece at a set value by inputting a gap maintenance command and a movement command. A gap maintenance command storage means for storing a gap maintenance command; a fast-forward determination means for determining whether or not the movement command is in the fast-forward mode; controlled by the output signal of the fast-forward determination means, during the period when the movement command is in the fast-forward mode A laser processing machine characterized by comprising a gate means that does not allow an output signal instructing gap maintenance from a gap maintenance command storage means to pass through.
JP62330946A 1987-12-26 1987-12-26 Laser beam machine Pending JPH01170589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62330946A JPH01170589A (en) 1987-12-26 1987-12-26 Laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62330946A JPH01170589A (en) 1987-12-26 1987-12-26 Laser beam machine

Publications (1)

Publication Number Publication Date
JPH01170589A true JPH01170589A (en) 1989-07-05

Family

ID=18238185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62330946A Pending JPH01170589A (en) 1987-12-26 1987-12-26 Laser beam machine

Country Status (1)

Country Link
JP (1) JPH01170589A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05212573A (en) * 1992-02-05 1993-08-24 Fanuc Ltd System for controlling quick traverse
CN106637195A (en) * 2016-12-15 2017-05-10 中国矿业大学 Coaxial powder feeding sprayer capable of automatically adjusting light spots and powder feeding positions

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05212573A (en) * 1992-02-05 1993-08-24 Fanuc Ltd System for controlling quick traverse
CN106637195A (en) * 2016-12-15 2017-05-10 中国矿业大学 Coaxial powder feeding sprayer capable of automatically adjusting light spots and powder feeding positions

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