JPH01168947U - - Google Patents

Info

Publication number
JPH01168947U
JPH01168947U JP6639788U JP6639788U JPH01168947U JP H01168947 U JPH01168947 U JP H01168947U JP 6639788 U JP6639788 U JP 6639788U JP 6639788 U JP6639788 U JP 6639788U JP H01168947 U JPH01168947 U JP H01168947U
Authority
JP
Japan
Prior art keywords
exhaust pipe
tube
chamber
application device
induced plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6639788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518837Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6639788U priority Critical patent/JPH0518837Y2/ja
Publication of JPH01168947U publication Critical patent/JPH01168947U/ja
Application granted granted Critical
Publication of JPH0518837Y2 publication Critical patent/JPH0518837Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP6639788U 1988-05-20 1988-05-20 Expired - Lifetime JPH0518837Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6639788U JPH0518837Y2 (enrdf_load_stackoverflow) 1988-05-20 1988-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6639788U JPH0518837Y2 (enrdf_load_stackoverflow) 1988-05-20 1988-05-20

Publications (2)

Publication Number Publication Date
JPH01168947U true JPH01168947U (enrdf_load_stackoverflow) 1989-11-29
JPH0518837Y2 JPH0518837Y2 (enrdf_load_stackoverflow) 1993-05-19

Family

ID=31291803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6639788U Expired - Lifetime JPH0518837Y2 (enrdf_load_stackoverflow) 1988-05-20 1988-05-20

Country Status (1)

Country Link
JP (1) JPH0518837Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0518837Y2 (enrdf_load_stackoverflow) 1993-05-19

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