JPH01168946U - - Google Patents
Info
- Publication number
- JPH01168946U JPH01168946U JP6639688U JP6639688U JPH01168946U JP H01168946 U JPH01168946 U JP H01168946U JP 6639688 U JP6639688 U JP 6639688U JP 6639688 U JP6639688 U JP 6639688U JP H01168946 U JPH01168946 U JP H01168946U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- metal member
- disposed
- induced plasma
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 3
- 230000006698 induction Effects 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6639688U JPH01168946U (no) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6639688U JPH01168946U (no) | 1988-05-20 | 1988-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01168946U true JPH01168946U (no) | 1989-11-29 |
Family
ID=31291802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6639688U Pending JPH01168946U (no) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01168946U (no) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6269454A (ja) * | 1985-09-17 | 1987-03-30 | ユナイテッド キングドム アトミック エナ↓−ヂイ オ↓−ソリテイ | イオン源 |
-
1988
- 1988-05-20 JP JP6639688U patent/JPH01168946U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6269454A (ja) * | 1985-09-17 | 1987-03-30 | ユナイテッド キングドム アトミック エナ↓−ヂイ オ↓−ソリテイ | イオン源 |