JPH01127236U - - Google Patents
Info
- Publication number
- JPH01127236U JPH01127236U JP2367088U JP2367088U JPH01127236U JP H01127236 U JPH01127236 U JP H01127236U JP 2367088 U JP2367088 U JP 2367088U JP 2367088 U JP2367088 U JP 2367088U JP H01127236 U JPH01127236 U JP H01127236U
- Authority
- JP
- Japan
- Prior art keywords
- microwave chamber
- plasma generation
- generation region
- region
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Particle Accelerators (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2367088U JPH01127236U (no) | 1988-02-23 | 1988-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2367088U JPH01127236U (no) | 1988-02-23 | 1988-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01127236U true JPH01127236U (no) | 1989-08-31 |
Family
ID=31242856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2367088U Pending JPH01127236U (no) | 1988-02-23 | 1988-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01127236U (no) |
-
1988
- 1988-02-23 JP JP2367088U patent/JPH01127236U/ja active Pending