JPH01168558U - - Google Patents
Info
- Publication number
- JPH01168558U JPH01168558U JP6668688U JP6668688U JPH01168558U JP H01168558 U JPH01168558 U JP H01168558U JP 6668688 U JP6668688 U JP 6668688U JP 6668688 U JP6668688 U JP 6668688U JP H01168558 U JPH01168558 U JP H01168558U
- Authority
- JP
- Japan
- Prior art keywords
- pan
- counterbore
- wafer
- holding
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6668688U JPH01168558U (th) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6668688U JPH01168558U (th) | 1988-05-20 | 1988-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01168558U true JPH01168558U (th) | 1989-11-28 |
Family
ID=31292083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6668688U Pending JPH01168558U (th) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01168558U (th) |
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1988
- 1988-05-20 JP JP6668688U patent/JPH01168558U/ja active Pending