JPH01168552U - - Google Patents

Info

Publication number
JPH01168552U
JPH01168552U JP6521788U JP6521788U JPH01168552U JP H01168552 U JPH01168552 U JP H01168552U JP 6521788 U JP6521788 U JP 6521788U JP 6521788 U JP6521788 U JP 6521788U JP H01168552 U JPH01168552 U JP H01168552U
Authority
JP
Japan
Prior art keywords
vacuum
seal
line
width direction
sealing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6521788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6521788U priority Critical patent/JPH01168552U/ja
Publication of JPH01168552U publication Critical patent/JPH01168552U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
JP6521788U 1988-05-19 1988-05-19 Pending JPH01168552U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6521788U JPH01168552U (enrdf_load_stackoverflow) 1988-05-19 1988-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6521788U JPH01168552U (enrdf_load_stackoverflow) 1988-05-19 1988-05-19

Publications (1)

Publication Number Publication Date
JPH01168552U true JPH01168552U (enrdf_load_stackoverflow) 1989-11-28

Family

ID=31290658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6521788U Pending JPH01168552U (enrdf_load_stackoverflow) 1988-05-19 1988-05-19

Country Status (1)

Country Link
JP (1) JPH01168552U (enrdf_load_stackoverflow)

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