JPH01136165U - - Google Patents

Info

Publication number
JPH01136165U
JPH01136165U JP2946388U JP2946388U JPH01136165U JP H01136165 U JPH01136165 U JP H01136165U JP 2946388 U JP2946388 U JP 2946388U JP 2946388 U JP2946388 U JP 2946388U JP H01136165 U JPH01136165 U JP H01136165U
Authority
JP
Japan
Prior art keywords
sealing device
plate
vacuum sealing
seal
shaped material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2946388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2946388U priority Critical patent/JPH01136165U/ja
Publication of JPH01136165U publication Critical patent/JPH01136165U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2946388U 1988-03-05 1988-03-05 Pending JPH01136165U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2946388U JPH01136165U (enrdf_load_stackoverflow) 1988-03-05 1988-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2946388U JPH01136165U (enrdf_load_stackoverflow) 1988-03-05 1988-03-05

Publications (1)

Publication Number Publication Date
JPH01136165U true JPH01136165U (enrdf_load_stackoverflow) 1989-09-18

Family

ID=31253699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2946388U Pending JPH01136165U (enrdf_load_stackoverflow) 1988-03-05 1988-03-05

Country Status (1)

Country Link
JP (1) JPH01136165U (enrdf_load_stackoverflow)

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