JPH01141761U - - Google Patents

Info

Publication number
JPH01141761U
JPH01141761U JP3135488U JP3135488U JPH01141761U JP H01141761 U JPH01141761 U JP H01141761U JP 3135488 U JP3135488 U JP 3135488U JP 3135488 U JP3135488 U JP 3135488U JP H01141761 U JPH01141761 U JP H01141761U
Authority
JP
Japan
Prior art keywords
soft elastic
sealing device
circumferential surface
attached
vacuum sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3135488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3135488U priority Critical patent/JPH01141761U/ja
Publication of JPH01141761U publication Critical patent/JPH01141761U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP3135488U 1988-03-09 1988-03-09 Pending JPH01141761U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3135488U JPH01141761U (enrdf_load_stackoverflow) 1988-03-09 1988-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3135488U JPH01141761U (enrdf_load_stackoverflow) 1988-03-09 1988-03-09

Publications (1)

Publication Number Publication Date
JPH01141761U true JPH01141761U (enrdf_load_stackoverflow) 1989-09-28

Family

ID=31257159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3135488U Pending JPH01141761U (enrdf_load_stackoverflow) 1988-03-09 1988-03-09

Country Status (1)

Country Link
JP (1) JPH01141761U (enrdf_load_stackoverflow)

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