JPH01167046U - - Google Patents
Info
- Publication number
- JPH01167046U JPH01167046U JP6367288U JP6367288U JPH01167046U JP H01167046 U JPH01167046 U JP H01167046U JP 6367288 U JP6367288 U JP 6367288U JP 6367288 U JP6367288 U JP 6367288U JP H01167046 U JPH01167046 U JP H01167046U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- guide
- transfer position
- comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6367288U JPH0727626Y2 (ja) | 1988-05-13 | 1988-05-13 | ウエハー移し換え装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6367288U JPH0727626Y2 (ja) | 1988-05-13 | 1988-05-13 | ウエハー移し換え装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01167046U true JPH01167046U (no) | 1989-11-22 |
| JPH0727626Y2 JPH0727626Y2 (ja) | 1995-06-21 |
Family
ID=31289165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6367288U Expired - Lifetime JPH0727626Y2 (ja) | 1988-05-13 | 1988-05-13 | ウエハー移し換え装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0727626Y2 (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010219337A (ja) * | 2009-03-17 | 2010-09-30 | Honda Motor Co Ltd | 板状部材の位置決め搬送方法及びその装置 |
-
1988
- 1988-05-13 JP JP6367288U patent/JPH0727626Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010219337A (ja) * | 2009-03-17 | 2010-09-30 | Honda Motor Co Ltd | 板状部材の位置決め搬送方法及びその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0727626Y2 (ja) | 1995-06-21 |
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