JPH01167035U - - Google Patents
Info
- Publication number
- JPH01167035U JPH01167035U JP6360388U JP6360388U JPH01167035U JP H01167035 U JPH01167035 U JP H01167035U JP 6360388 U JP6360388 U JP 6360388U JP 6360388 U JP6360388 U JP 6360388U JP H01167035 U JPH01167035 U JP H01167035U
- Authority
- JP
- Japan
- Prior art keywords
- purge gas
- gas
- control valve
- valve
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 10
- 238000010926 purge Methods 0.000 claims description 7
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000010790 dilution Methods 0.000 claims 1
- 239000012895 dilution Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6360388U JPH01167035U (zh) | 1988-05-13 | 1988-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6360388U JPH01167035U (zh) | 1988-05-13 | 1988-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01167035U true JPH01167035U (zh) | 1989-11-22 |
Family
ID=31289099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6360388U Pending JPH01167035U (zh) | 1988-05-13 | 1988-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01167035U (zh) |
-
1988
- 1988-05-13 JP JP6360388U patent/JPH01167035U/ja active Pending