JPH01156739U - - Google Patents
Info
- Publication number
- JPH01156739U JPH01156739U JP5199488U JP5199488U JPH01156739U JP H01156739 U JPH01156739 U JP H01156739U JP 5199488 U JP5199488 U JP 5199488U JP 5199488 U JP5199488 U JP 5199488U JP H01156739 U JPH01156739 U JP H01156739U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- vacuum chamber
- vacuum
- returning
- controlling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Control Of Fluid Pressure (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199488U JPH01156739U (zh) | 1988-04-18 | 1988-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199488U JPH01156739U (zh) | 1988-04-18 | 1988-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156739U true JPH01156739U (zh) | 1989-10-27 |
Family
ID=31278007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5199488U Pending JPH01156739U (zh) | 1988-04-18 | 1988-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156739U (zh) |
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1988
- 1988-04-18 JP JP5199488U patent/JPH01156739U/ja active Pending