JPH01166293U - - Google Patents
Info
- Publication number
- JPH01166293U JPH01166293U JP1653489U JP1653489U JPH01166293U JP H01166293 U JPH01166293 U JP H01166293U JP 1653489 U JP1653489 U JP 1653489U JP 1653489 U JP1653489 U JP 1653489U JP H01166293 U JPH01166293 U JP H01166293U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- turbo
- set value
- molecular pump
- detection output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Control Of Positive-Displacement Air Blowers (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653489U JPH01166293U (en, 2012) | 1989-02-15 | 1989-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653489U JPH01166293U (en, 2012) | 1989-02-15 | 1989-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01166293U true JPH01166293U (en, 2012) | 1989-11-21 |
Family
ID=31229553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1653489U Pending JPH01166293U (en, 2012) | 1989-02-15 | 1989-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01166293U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998032972A1 (en) * | 1997-01-22 | 1998-07-30 | Seiko Seiki Kabushiki Kaisha | Turbo molecular pump |
| JP2011047399A (ja) * | 2009-08-28 | 2011-03-10 | Pfeiffer Vacuum Gmbh | 真空ポンプの運転方法および分子真空ポンプ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS495846A (en, 2012) * | 1972-04-11 | 1974-01-19 |
-
1989
- 1989-02-15 JP JP1653489U patent/JPH01166293U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS495846A (en, 2012) * | 1972-04-11 | 1974-01-19 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998032972A1 (en) * | 1997-01-22 | 1998-07-30 | Seiko Seiki Kabushiki Kaisha | Turbo molecular pump |
| JP2011047399A (ja) * | 2009-08-28 | 2011-03-10 | Pfeiffer Vacuum Gmbh | 真空ポンプの運転方法および分子真空ポンプ |