JPH01166293U - - Google Patents

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Publication number
JPH01166293U
JPH01166293U JP1653489U JP1653489U JPH01166293U JP H01166293 U JPH01166293 U JP H01166293U JP 1653489 U JP1653489 U JP 1653489U JP 1653489 U JP1653489 U JP 1653489U JP H01166293 U JPH01166293 U JP H01166293U
Authority
JP
Japan
Prior art keywords
motor
turbo
set value
molecular pump
detection output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1653489U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1653489U priority Critical patent/JPH01166293U/ja
Publication of JPH01166293U publication Critical patent/JPH01166293U/ja
Pending legal-status Critical Current

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Landscapes

  • Control Of Positive-Displacement Air Blowers (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図はこの考案のターボ分子ポンプ装置の構
成例を示す図、第２図はこの考案の電気的構成を
示す回路ブロツク図、第３図は同タイムチヤート
である。 １…ターボ分子ポンプ本体、２…電源部、３…
モータ、４…回転数検出器、５…設定器、６…比
較回路。

Claims (1)

    【実用新案登録請求の範囲】
  1. ロータ翼が設けられ、モータの駆動により回転
    するロータを備えたターボ分子ポンプ装置におい
    て、ターボ分子ポンプ内の圧力、モータの駆動時
    間またはロータの回転数を検出する検出手段と、
    この検知出力と設定値を比較する比較手段と、比
    較手段からの出力に応じて前記検知出力が設定値
    以上でモータへの通電をオフし、設定値以下でモ
    ータへの通電をオンする制御回路とを備えたこと
    を特徴とするターボ分子ポンプ装置。
JP1653489U 1989-02-15 1989-02-15 Pending JPH01166293U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1653489U JPH01166293U (ja) 1989-02-15 1989-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1653489U JPH01166293U (ja) 1989-02-15 1989-02-15

Publications (1)

Publication Number Publication Date
JPH01166293U true JPH01166293U (ja) 1989-11-21

Family

ID=31229553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1653489U Pending JPH01166293U (ja) 1989-02-15 1989-02-15

Country Status (1)

Country Link
JP (1) JPH01166293U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998032972A1 (fr) * 1997-01-22 1998-07-30 Seiko Seiki Kabushiki Kaisha Pompe turbomoleculaire
JP2011047399A (ja) * 2009-08-28 2011-03-10 Pfeiffer Vacuum Gmbh 真空ポンプの運転方法および分子真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495846A (ja) * 1972-04-11 1974-01-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495846A (ja) * 1972-04-11 1974-01-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998032972A1 (fr) * 1997-01-22 1998-07-30 Seiko Seiki Kabushiki Kaisha Pompe turbomoleculaire
JP2011047399A (ja) * 2009-08-28 2011-03-10 Pfeiffer Vacuum Gmbh 真空ポンプの運転方法および分子真空ポンプ

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