JPH01165646U - - Google Patents

Info

Publication number
JPH01165646U
JPH01165646U JP6121088U JP6121088U JPH01165646U JP H01165646 U JPH01165646 U JP H01165646U JP 6121088 U JP6121088 U JP 6121088U JP 6121088 U JP6121088 U JP 6121088U JP H01165646 U JPH01165646 U JP H01165646U
Authority
JP
Japan
Prior art keywords
facet
wafer
main body
aligner
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6121088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6121088U priority Critical patent/JPH01165646U/ja
Publication of JPH01165646U publication Critical patent/JPH01165646U/ja
Pending legal-status Critical Current

Links

JP6121088U 1988-05-10 1988-05-10 Pending JPH01165646U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6121088U JPH01165646U (fr) 1988-05-10 1988-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6121088U JPH01165646U (fr) 1988-05-10 1988-05-10

Publications (1)

Publication Number Publication Date
JPH01165646U true JPH01165646U (fr) 1989-11-20

Family

ID=31286886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6121088U Pending JPH01165646U (fr) 1988-05-10 1988-05-10

Country Status (1)

Country Link
JP (1) JPH01165646U (fr)

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