JPH01165646U - - Google Patents
Info
- Publication number
- JPH01165646U JPH01165646U JP6121088U JP6121088U JPH01165646U JP H01165646 U JPH01165646 U JP H01165646U JP 6121088 U JP6121088 U JP 6121088U JP 6121088 U JP6121088 U JP 6121088U JP H01165646 U JPH01165646 U JP H01165646U
- Authority
- JP
- Japan
- Prior art keywords
- facet
- wafer
- main body
- aligner
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 7
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6121088U JPH01165646U (fr) | 1988-05-10 | 1988-05-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6121088U JPH01165646U (fr) | 1988-05-10 | 1988-05-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01165646U true JPH01165646U (fr) | 1989-11-20 |
Family
ID=31286886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6121088U Pending JPH01165646U (fr) | 1988-05-10 | 1988-05-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01165646U (fr) |
-
1988
- 1988-05-10 JP JP6121088U patent/JPH01165646U/ja active Pending