JPH01165628U - - Google Patents
Info
- Publication number
- JPH01165628U JPH01165628U JP6248788U JP6248788U JPH01165628U JP H01165628 U JPH01165628 U JP H01165628U JP 6248788 U JP6248788 U JP 6248788U JP 6248788 U JP6248788 U JP 6248788U JP H01165628 U JPH01165628 U JP H01165628U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- wafer
- wafers
- support stand
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000004380 ashing Methods 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6248788U JPH01165628U (no) | 1988-05-12 | 1988-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6248788U JPH01165628U (no) | 1988-05-12 | 1988-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165628U true JPH01165628U (no) | 1989-11-20 |
Family
ID=31288095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6248788U Pending JPH01165628U (no) | 1988-05-12 | 1988-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165628U (no) |
-
1988
- 1988-05-12 JP JP6248788U patent/JPH01165628U/ja active Pending