JPH01165556U - - Google Patents
Info
- Publication number
- JPH01165556U JPH01165556U JP6107588U JP6107588U JPH01165556U JP H01165556 U JPH01165556 U JP H01165556U JP 6107588 U JP6107588 U JP 6107588U JP 6107588 U JP6107588 U JP 6107588U JP H01165556 U JPH01165556 U JP H01165556U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- movement
- base
- motors
- rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 1
Description
第１図は本案の一実施例の全体図、第２図はＸ
軸ナツト部の詳細図である。
１…ベース、２…Ｙテーブル、３…Ｘテーブル
、４…ベアリング、５…Ｘ軸ボールねじ、６…駆
動レール、８…ガイドレール、９…Ｙ軸ボールね
じ、１０…Ｘモータ、１１…Ｙモータ。
Figure 1 is an overall view of one embodiment of the present proposal, and Figure 2 is an
It is a detailed view of the shaft nut part. 1...base, 2...Y table, 3...X table, 4...bearing, 5...X-axis ball screw, 6...drive rail, 8...guide rail, 9...Y-axis ball screw, 10...X motor, 11...Y motor.
Claims (1)
上で一方向に直線的に移動可能なＹ（Ｘ）テーブ
ルと、前記Ｙ（Ｘ）テーブル上で、Ｙ（Ｘ）テー
ブルの移動方向と直交する方向に直線的に移動可
能なＸ（Ｙ）テーブルと、おのおののテーブルを
精度よく案内するレールと、駆動するモータと送
りねじよりなるＸＹステージにおいて、Ｘテーブ
ルに取り付けた回転体と、Ｘテーブルの移動方向
と直交する駆動レールとその駆動レールをＸテー
ブルの移動方向に案内する部材を設け、前記送り
ねじ及びＸテーブルに回転モーメントが直接加わ
らないように構成したことを特徴とするＸＹステ
ージ。 ２ 請求の範囲第１項において、ＸＹ両軸の送り
ねじ及びモータを前記ベースに固定し、前記モー
タ及び送りねじがＸＹ方向に移動しないことを特
徴とするＸＹステージ。[Claims for Utility Model Registration] 1. A base serving as a substrate of a stage, a Y(X) table movable linearly in one direction on the base, and a Y(X) table on the Y(X) table. The XY stage consists of an X (Y) table that can move linearly in a direction perpendicular to the direction of table movement, a rail that guides each table with precision, a driving motor, and a feed screw. A rotating body, a drive rail perpendicular to the direction of movement of the X-table, and a member for guiding the drive rail in the direction of movement of the X-table are provided, so that a rotational moment is not directly applied to the feed screw and the Features an XY stage. 2. The XY stage according to claim 1, wherein feed screws and motors for both XY axes are fixed to the base, and the motors and feed screws do not move in the XY directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6107588U JPH01165556U (en) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6107588U JPH01165556U (en) | 1988-05-11 | 1988-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165556U true JPH01165556U (en) | 1989-11-20 |
Family
ID=31286752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6107588U Pending JPH01165556U (en) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165556U (en) |
-
1988
- 1988-05-11 JP JP6107588U patent/JPH01165556U/ja active Pending
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