JPH01164762U - - Google Patents
Info
- Publication number
- JPH01164762U JPH01164762U JP6121188U JP6121188U JPH01164762U JP H01164762 U JPH01164762 U JP H01164762U JP 6121188 U JP6121188 U JP 6121188U JP 6121188 U JP6121188 U JP 6121188U JP H01164762 U JPH01164762 U JP H01164762U
- Authority
- JP
- Japan
- Prior art keywords
- feeding plate
- power
- power feeding
- wafer
- around
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6121188U JPH01164762U (es) | 1988-05-10 | 1988-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6121188U JPH01164762U (es) | 1988-05-10 | 1988-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01164762U true JPH01164762U (es) | 1989-11-17 |
Family
ID=31286887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6121188U Pending JPH01164762U (es) | 1988-05-10 | 1988-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01164762U (es) |
-
1988
- 1988-05-10 JP JP6121188U patent/JPH01164762U/ja active Pending