JPH01164760U - - Google Patents
Info
- Publication number
- JPH01164760U JPH01164760U JP6176888U JP6176888U JPH01164760U JP H01164760 U JPH01164760 U JP H01164760U JP 6176888 U JP6176888 U JP 6176888U JP 6176888 U JP6176888 U JP 6176888U JP H01164760 U JPH01164760 U JP H01164760U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- sample chamber
- ion generation
- chamber
- generation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6176888U JPH01164760U (id) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6176888U JPH01164760U (id) | 1988-05-11 | 1988-05-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01164760U true JPH01164760U (id) | 1989-11-17 |
Family
ID=31287415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6176888U Pending JPH01164760U (id) | 1988-05-11 | 1988-05-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01164760U (id) |
-
1988
- 1988-05-11 JP JP6176888U patent/JPH01164760U/ja active Pending