JPH01164060U - - Google Patents
Info
- Publication number
- JPH01164060U JPH01164060U JP1988061936U JP6193688U JPH01164060U JP H01164060 U JPH01164060 U JP H01164060U JP 1988061936 U JP1988061936 U JP 1988061936U JP 6193688 U JP6193688 U JP 6193688U JP H01164060 U JPH01164060 U JP H01164060U
- Authority
- JP
- Japan
- Prior art keywords
- polishing surface
- surface plate
- runner
- groove
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988061936U JPH0540928Y2 (cs) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988061936U JPH0540928Y2 (cs) | 1988-05-11 | 1988-05-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01164060U true JPH01164060U (cs) | 1989-11-15 |
| JPH0540928Y2 JPH0540928Y2 (cs) | 1993-10-18 |
Family
ID=31287576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988061936U Expired - Lifetime JPH0540928Y2 (cs) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540928Y2 (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999033612A1 (fr) * | 1997-12-26 | 1999-07-08 | Ebara Corporation | Dispositif de polissage |
| JP2019181689A (ja) * | 2018-04-02 | 2019-10-24 | 株式会社荏原製作所 | 研磨装置及び基板処理装置 |
-
1988
- 1988-05-11 JP JP1988061936U patent/JPH0540928Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999033612A1 (fr) * | 1997-12-26 | 1999-07-08 | Ebara Corporation | Dispositif de polissage |
| JP2019181689A (ja) * | 2018-04-02 | 2019-10-24 | 株式会社荏原製作所 | 研磨装置及び基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0540928Y2 (cs) | 1993-10-18 |
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