JPH01163338U - - Google Patents

Info

Publication number
JPH01163338U
JPH01163338U JP5207589U JP5207589U JPH01163338U JP H01163338 U JPH01163338 U JP H01163338U JP 5207589 U JP5207589 U JP 5207589U JP 5207589 U JP5207589 U JP 5207589U JP H01163338 U JPH01163338 U JP H01163338U
Authority
JP
Japan
Prior art keywords
lid
holding plate
pieces
semiconductor wafer
wafer case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5207589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0231789Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989052075U priority Critical patent/JPH0231789Y2/ja
Publication of JPH01163338U publication Critical patent/JPH01163338U/ja
Application granted granted Critical
Publication of JPH0231789Y2 publication Critical patent/JPH0231789Y2/ja
Expired legal-status Critical Current

Links

JP1989052075U 1989-05-02 1989-05-02 Expired JPH0231789Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989052075U JPH0231789Y2 (enrdf_load_stackoverflow) 1989-05-02 1989-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989052075U JPH0231789Y2 (enrdf_load_stackoverflow) 1989-05-02 1989-05-02

Publications (2)

Publication Number Publication Date
JPH01163338U true JPH01163338U (enrdf_load_stackoverflow) 1989-11-14
JPH0231789Y2 JPH0231789Y2 (enrdf_load_stackoverflow) 1990-08-28

Family

ID=31278086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989052075U Expired JPH0231789Y2 (enrdf_load_stackoverflow) 1989-05-02 1989-05-02

Country Status (1)

Country Link
JP (1) JPH0231789Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931238U (ja) * 1982-08-24 1984-02-27 三菱マテリアル株式会社 半導体ウエハ−の収納容器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931238U (ja) * 1982-08-24 1984-02-27 三菱マテリアル株式会社 半導体ウエハ−の収納容器

Also Published As

Publication number Publication date
JPH0231789Y2 (enrdf_load_stackoverflow) 1990-08-28

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