JPH01163140U - - Google Patents
Info
- Publication number
- JPH01163140U JPH01163140U JP5983288U JP5983288U JPH01163140U JP H01163140 U JPH01163140 U JP H01163140U JP 5983288 U JP5983288 U JP 5983288U JP 5983288 U JP5983288 U JP 5983288U JP H01163140 U JPH01163140 U JP H01163140U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- comb
- substrate
- edge
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Electronic Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5983288U JPH01163140U (cs) | 1988-05-06 | 1988-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5983288U JPH01163140U (cs) | 1988-05-06 | 1988-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01163140U true JPH01163140U (cs) | 1989-11-14 |
Family
ID=31285570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5983288U Pending JPH01163140U (cs) | 1988-05-06 | 1988-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01163140U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5812775A (ja) * | 1981-07-15 | 1983-01-24 | Nec Home Electronics Ltd | サ−マルヘツドの製造方法 |
| JPS61110569A (ja) * | 1984-11-06 | 1986-05-28 | Yokogawa Hokushin Electric Corp | サ−マルヘツドおよびその製造方法 |
-
1988
- 1988-05-06 JP JP5983288U patent/JPH01163140U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5812775A (ja) * | 1981-07-15 | 1983-01-24 | Nec Home Electronics Ltd | サ−マルヘツドの製造方法 |
| JPS61110569A (ja) * | 1984-11-06 | 1986-05-28 | Yokogawa Hokushin Electric Corp | サ−マルヘツドおよびその製造方法 |