JPH01162645U - - Google Patents

Info

Publication number
JPH01162645U
JPH01162645U JP5736888U JP5736888U JPH01162645U JP H01162645 U JPH01162645 U JP H01162645U JP 5736888 U JP5736888 U JP 5736888U JP 5736888 U JP5736888 U JP 5736888U JP H01162645 U JPH01162645 U JP H01162645U
Authority
JP
Japan
Prior art keywords
vacuum pressure
pressure circuit
detection device
measuring device
suction pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5736888U
Other languages
English (en)
Japanese (ja)
Other versions
JP2544058Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988057368U priority Critical patent/JP2544058Y2/ja
Publication of JPH01162645U publication Critical patent/JPH01162645U/ja
Application granted granted Critical
Publication of JP2544058Y2 publication Critical patent/JP2544058Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Examining Or Testing Airtightness (AREA)
JP1988057368U 1988-04-28 1988-04-28 真空圧回路の漏洩検出装置 Expired - Lifetime JP2544058Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988057368U JP2544058Y2 (ja) 1988-04-28 1988-04-28 真空圧回路の漏洩検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988057368U JP2544058Y2 (ja) 1988-04-28 1988-04-28 真空圧回路の漏洩検出装置

Publications (2)

Publication Number Publication Date
JPH01162645U true JPH01162645U (enrdf_load_stackoverflow) 1989-11-13
JP2544058Y2 JP2544058Y2 (ja) 1997-08-13

Family

ID=31283227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988057368U Expired - Lifetime JP2544058Y2 (ja) 1988-04-28 1988-04-28 真空圧回路の漏洩検出装置

Country Status (1)

Country Link
JP (1) JP2544058Y2 (enrdf_load_stackoverflow)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52129257U (enrdf_load_stackoverflow) * 1976-03-02 1977-10-01
JPS5371480U (enrdf_load_stackoverflow) * 1976-11-17 1978-06-15
JPS61132379U (enrdf_load_stackoverflow) * 1985-02-06 1986-08-18
JPS6225319U (enrdf_load_stackoverflow) * 1985-07-31 1987-02-16
JPS62197731A (ja) * 1986-02-25 1987-09-01 Fuji Electric Co Ltd 半導体圧力センサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52129257U (enrdf_load_stackoverflow) * 1976-03-02 1977-10-01
JPS5371480U (enrdf_load_stackoverflow) * 1976-11-17 1978-06-15
JPS61132379U (enrdf_load_stackoverflow) * 1985-02-06 1986-08-18
JPS6225319U (enrdf_load_stackoverflow) * 1985-07-31 1987-02-16
JPS62197731A (ja) * 1986-02-25 1987-09-01 Fuji Electric Co Ltd 半導体圧力センサ

Also Published As

Publication number Publication date
JP2544058Y2 (ja) 1997-08-13

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