JPH01162645U - - Google Patents
Info
- Publication number
- JPH01162645U JPH01162645U JP5736888U JP5736888U JPH01162645U JP H01162645 U JPH01162645 U JP H01162645U JP 5736888 U JP5736888 U JP 5736888U JP 5736888 U JP5736888 U JP 5736888U JP H01162645 U JPH01162645 U JP H01162645U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pressure
- pressure circuit
- detection device
- measuring device
- suction pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 6
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 2
Landscapes
- Examining Or Testing Airtightness (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988057368U JP2544058Y2 (ja) | 1988-04-28 | 1988-04-28 | 真空圧回路の漏洩検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988057368U JP2544058Y2 (ja) | 1988-04-28 | 1988-04-28 | 真空圧回路の漏洩検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01162645U true JPH01162645U (enrdf_load_stackoverflow) | 1989-11-13 |
| JP2544058Y2 JP2544058Y2 (ja) | 1997-08-13 |
Family
ID=31283227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988057368U Expired - Lifetime JP2544058Y2 (ja) | 1988-04-28 | 1988-04-28 | 真空圧回路の漏洩検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2544058Y2 (enrdf_load_stackoverflow) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52129257U (enrdf_load_stackoverflow) * | 1976-03-02 | 1977-10-01 | ||
| JPS5371480U (enrdf_load_stackoverflow) * | 1976-11-17 | 1978-06-15 | ||
| JPS61132379U (enrdf_load_stackoverflow) * | 1985-02-06 | 1986-08-18 | ||
| JPS6225319U (enrdf_load_stackoverflow) * | 1985-07-31 | 1987-02-16 | ||
| JPS62197731A (ja) * | 1986-02-25 | 1987-09-01 | Fuji Electric Co Ltd | 半導体圧力センサ |
-
1988
- 1988-04-28 JP JP1988057368U patent/JP2544058Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52129257U (enrdf_load_stackoverflow) * | 1976-03-02 | 1977-10-01 | ||
| JPS5371480U (enrdf_load_stackoverflow) * | 1976-11-17 | 1978-06-15 | ||
| JPS61132379U (enrdf_load_stackoverflow) * | 1985-02-06 | 1986-08-18 | ||
| JPS6225319U (enrdf_load_stackoverflow) * | 1985-07-31 | 1987-02-16 | ||
| JPS62197731A (ja) * | 1986-02-25 | 1987-09-01 | Fuji Electric Co Ltd | 半導体圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2544058Y2 (ja) | 1997-08-13 |