JPH01162235U - - Google Patents
Info
- Publication number
- JPH01162235U JPH01162235U JP5537288U JP5537288U JPH01162235U JP H01162235 U JPH01162235 U JP H01162235U JP 5537288 U JP5537288 U JP 5537288U JP 5537288 U JP5537288 U JP 5537288U JP H01162235 U JPH01162235 U JP H01162235U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- end wall
- wafer carrier
- side walls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5537288U JPH01162235U (enExample) | 1988-04-25 | 1988-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5537288U JPH01162235U (enExample) | 1988-04-25 | 1988-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01162235U true JPH01162235U (enExample) | 1989-11-10 |
Family
ID=31281272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5537288U Pending JPH01162235U (enExample) | 1988-04-25 | 1988-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01162235U (enExample) |
-
1988
- 1988-04-25 JP JP5537288U patent/JPH01162235U/ja active Pending