JPH01162235U - - Google Patents

Info

Publication number
JPH01162235U
JPH01162235U JP5537288U JP5537288U JPH01162235U JP H01162235 U JPH01162235 U JP H01162235U JP 5537288 U JP5537288 U JP 5537288U JP 5537288 U JP5537288 U JP 5537288U JP H01162235 U JPH01162235 U JP H01162235U
Authority
JP
Japan
Prior art keywords
wafer
end wall
pocket
wafer carrier
side walls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5537288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5537288U priority Critical patent/JPH01162235U/ja
Publication of JPH01162235U publication Critical patent/JPH01162235U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP5537288U 1988-04-25 1988-04-25 Pending JPH01162235U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5537288U JPH01162235U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-25 1988-04-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5537288U JPH01162235U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-25 1988-04-25

Publications (1)

Publication Number Publication Date
JPH01162235U true JPH01162235U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-11-10

Family

ID=31281272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5537288U Pending JPH01162235U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-25 1988-04-25

Country Status (1)

Country Link
JP (1) JPH01162235U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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