JPH01161600U - - Google Patents

Info

Publication number
JPH01161600U
JPH01161600U JP5974388U JP5974388U JPH01161600U JP H01161600 U JPH01161600 U JP H01161600U JP 5974388 U JP5974388 U JP 5974388U JP 5974388 U JP5974388 U JP 5974388U JP H01161600 U JPH01161600 U JP H01161600U
Authority
JP
Japan
Prior art keywords
circular tube
gas supply
supply chamber
end wall
end portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5974388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0633679Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5974388U priority Critical patent/JPH0633679Y2/ja
Publication of JPH01161600U publication Critical patent/JPH01161600U/ja
Application granted granted Critical
Publication of JPH0633679Y2 publication Critical patent/JPH0633679Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP5974388U 1988-05-02 1988-05-02 インダクションプラズマ用トーチ Expired - Lifetime JPH0633679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5974388U JPH0633679Y2 (ja) 1988-05-02 1988-05-02 インダクションプラズマ用トーチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5974388U JPH0633679Y2 (ja) 1988-05-02 1988-05-02 インダクションプラズマ用トーチ

Publications (2)

Publication Number Publication Date
JPH01161600U true JPH01161600U (US20020128544A1-20020912-P00008.png) 1989-11-09
JPH0633679Y2 JPH0633679Y2 (ja) 1994-08-31

Family

ID=31285490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5974388U Expired - Lifetime JPH0633679Y2 (ja) 1988-05-02 1988-05-02 インダクションプラズマ用トーチ

Country Status (1)

Country Link
JP (1) JPH0633679Y2 (US20020128544A1-20020912-P00008.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008508683A (ja) * 2004-07-30 2008-03-21 アマランテ テクノロジーズ,インク. 均一でスケーラブルなマイクロ波プラズマ発生を行うためのプラズマノズルアレイ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008508683A (ja) * 2004-07-30 2008-03-21 アマランテ テクノロジーズ,インク. 均一でスケーラブルなマイクロ波プラズマ発生を行うためのプラズマノズルアレイ

Also Published As

Publication number Publication date
JPH0633679Y2 (ja) 1994-08-31

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