JPH01160838U - - Google Patents
Info
- Publication number
- JPH01160838U JPH01160838U JP4854888U JP4854888U JPH01160838U JP H01160838 U JPH01160838 U JP H01160838U JP 4854888 U JP4854888 U JP 4854888U JP 4854888 U JP4854888 U JP 4854888U JP H01160838 U JPH01160838 U JP H01160838U
- Authority
- JP
- Japan
- Prior art keywords
- air passage
- air
- stage
- main body
- stage main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Electron Sources, Ion Sources (AREA)
- Elimination Of Static Electricity (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4854888U JPH01160838U (id) | 1988-04-11 | 1988-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4854888U JPH01160838U (id) | 1988-04-11 | 1988-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160838U true JPH01160838U (id) | 1989-11-08 |
Family
ID=31274692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4854888U Pending JPH01160838U (id) | 1988-04-11 | 1988-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160838U (id) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0839377A (ja) * | 1994-07-29 | 1996-02-13 | Ckd Corp | 真空チャック装置からのワークの取り外し方法及びワークの取り外し装置 |
| JP2002066865A (ja) * | 2000-09-01 | 2002-03-05 | Disco Abrasive Syst Ltd | 切削装置 |
| JP2005017876A (ja) * | 2003-06-27 | 2005-01-20 | Nsk Ltd | ワークチャック及びその制御方法 |
| JP2007148462A (ja) * | 2007-03-19 | 2007-06-14 | Nsk Ltd | ワークチャック及びその制御方法 |
| JP2007148414A (ja) * | 2006-12-14 | 2007-06-14 | Nsk Ltd | ワークチャック及びその制御方法 |
| JP2007219537A (ja) * | 2007-03-19 | 2007-08-30 | Nsk Ltd | ワークチャック及びその制御方法 |
-
1988
- 1988-04-11 JP JP4854888U patent/JPH01160838U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0839377A (ja) * | 1994-07-29 | 1996-02-13 | Ckd Corp | 真空チャック装置からのワークの取り外し方法及びワークの取り外し装置 |
| JP2002066865A (ja) * | 2000-09-01 | 2002-03-05 | Disco Abrasive Syst Ltd | 切削装置 |
| JP2005017876A (ja) * | 2003-06-27 | 2005-01-20 | Nsk Ltd | ワークチャック及びその制御方法 |
| JP2007148414A (ja) * | 2006-12-14 | 2007-06-14 | Nsk Ltd | ワークチャック及びその制御方法 |
| JP2007148462A (ja) * | 2007-03-19 | 2007-06-14 | Nsk Ltd | ワークチャック及びその制御方法 |
| JP2007219537A (ja) * | 2007-03-19 | 2007-08-30 | Nsk Ltd | ワークチャック及びその制御方法 |