JPH01160828U - - Google Patents
Info
- Publication number
- JPH01160828U JPH01160828U JP4974588U JP4974588U JPH01160828U JP H01160828 U JPH01160828 U JP H01160828U JP 4974588 U JP4974588 U JP 4974588U JP 4974588 U JP4974588 U JP 4974588U JP H01160828 U JPH01160828 U JP H01160828U
- Authority
- JP
- Japan
- Prior art keywords
- light
- wafer
- light source
- exposure
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4974588U JPH01160828U (sv) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4974588U JPH01160828U (sv) | 1988-04-13 | 1988-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160828U true JPH01160828U (sv) | 1989-11-08 |
Family
ID=31275828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4974588U Pending JPH01160828U (sv) | 1988-04-13 | 1988-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160828U (sv) |
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1988
- 1988-04-13 JP JP4974588U patent/JPH01160828U/ja active Pending