JPH01160651U - - Google Patents
Info
- Publication number
- JPH01160651U JPH01160651U JP5823088U JP5823088U JPH01160651U JP H01160651 U JPH01160651 U JP H01160651U JP 5823088 U JP5823088 U JP 5823088U JP 5823088 U JP5823088 U JP 5823088U JP H01160651 U JPH01160651 U JP H01160651U
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- lens
- amplifier
- setting device
- threshold voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005856 abnormality Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5823088U JPH076610Y2 (ja) | 1988-04-27 | 1988-04-27 | イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5823088U JPH076610Y2 (ja) | 1988-04-27 | 1988-04-27 | イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01160651U true JPH01160651U (OSRAM) | 1989-11-08 |
| JPH076610Y2 JPH076610Y2 (ja) | 1995-02-15 |
Family
ID=31284054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5823088U Expired - Lifetime JPH076610Y2 (ja) | 1988-04-27 | 1988-04-27 | イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH076610Y2 (OSRAM) |
-
1988
- 1988-04-27 JP JP5823088U patent/JPH076610Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH076610Y2 (ja) | 1995-02-15 |