JPH01157429U - - Google Patents
Info
- Publication number
- JPH01157429U JPH01157429U JP4695088U JP4695088U JPH01157429U JP H01157429 U JPH01157429 U JP H01157429U JP 4695088 U JP4695088 U JP 4695088U JP 4695088 U JP4695088 U JP 4695088U JP H01157429 U JPH01157429 U JP H01157429U
- Authority
- JP
- Japan
- Prior art keywords
- main shaft
- swivel base
- motor
- vacuum
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4695088U JPH0625961Y2 (ja) | 1988-04-06 | 1988-04-06 | ウエハ搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4695088U JPH0625961Y2 (ja) | 1988-04-06 | 1988-04-06 | ウエハ搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01157429U true JPH01157429U (fr) | 1989-10-30 |
| JPH0625961Y2 JPH0625961Y2 (ja) | 1994-07-06 |
Family
ID=31273184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4695088U Expired - Lifetime JPH0625961Y2 (ja) | 1988-04-06 | 1988-04-06 | ウエハ搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625961Y2 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6740894B1 (en) * | 2003-02-21 | 2004-05-25 | Axcelis Technologies, Inc. | Adjustable implantation angle workpiece support structure for an ion beam implanter utilizing a linear scan motor |
| WO2010081009A2 (fr) * | 2009-01-11 | 2010-07-15 | Applied Materials, Inc. | Systèmes, appareil et procédés pour réaliser une connexion électrique à un robot et effecteur d'extrémité électrique associé |
-
1988
- 1988-04-06 JP JP4695088U patent/JPH0625961Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0625961Y2 (ja) | 1994-07-06 |