JPH01157280A - Saturable reactor for high-voltage pulse generating device - Google Patents

Abstract

PURPOSE:To improve cooling efficiency, by a method wherein a plurality of tape wound cores, employing an amorphous magnetic thin belt or the like, being applied with an insulating tape or the like between layers and having different sizes, is arranged concentrically and a saturable magnetic core having gaps is employed. CONSTITUTION:A saturable reactor for high-voltage pulse generating device is composed of input and output terminals 1, 3, a coaxial cylindrical conductor 2, an oil inlet port 4, an oil outlet port 5, tape-wound magnetic cores 6, an insulating body guide 8, an insulating body 9 and the like. In this case, an amorphous magnetic thin belt is employed for the tape-wound core 6 while an insulating tape or an insulating coating is applied between layers. Gaps 7 are provided in order to increase the cooling efficiency of the tape-wound core 6 while cooling oil is made to flow from the oil inlet port 4 through a route shown by arrow signs in a diagram to cool the edge faces of respective magnetic cores uniformly, is discharged from the oil outlet port 5 and is circulated by a pump. According to this method, said gaps 7 are formed in the saturable magnetic core by three pieces of tape-wound magnetic cores 6-1-6-3, which are arranged concentrically and provided with different configurations.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to a saturable magnetic switch used in a discharge excitation laser such as an excimer laser or a copper vapor laser, or a high voltage pulse generation circuit used in acceleration monitoring, etc. It is related to reactors.

[Conventional technology]

FIG. 6 shows an example of a tube voltage pulse generation circuit for an excimer laser, which is one type of discharge excitation laser. The circuit in FIG. 6 is called a magnetic compression circuit, and a DC voltage Vi is applied to the input terminals 31-32 thresholds with the polarities shown in the figure, and the size is 2.
While the TRON 64 is off, a voltage Vi of several tens of KVlit is normally applied to the capacitor 66 with the polarity shown.

The saturable reactor 68 in this circuit generates a voltage with a pulse width determined by the capacitances 66 and 37 applied across the capacitor 67 after the thyratron 64 is turned on, and the time constant of the inductance 35, which is necessary for the oscillation of the excimer laser. It is used to compress a voltage with a pulse width of about 100n+s, and for this reason it is also called a magnetic switch.
2 is the charging inductance of the main capacitor 66, 37.
39 is a peaking capacitor, 40 is a floating inductance caused by wiring, and 41 is an excimer laser main discharge pole.

In this circuit, since pulse compression is possible by using the saturable reactor 38, it is possible to suppress the peak loss, aftercurrent, and loss due to reversal current that occur when the thyratron 34 is turned on, and the excimer laser has a high return rate and a small amount. This makes it possible to achieve higher power output, higher output, and longer life.

FIG. 7 shows another example of a high voltage pulse generation circuit for excimer laser, and this circuit is called a magnetic assist circuit. The role of the reactive reactor 38 in this circuit is to reduce the switching loss that occurs when the thyratron 64 is turned on by delaying the rise of the indicated current. Higher output and longer life are possible.

The magnetic core for the above applications uses an amorphous magnetic ribbon, and has a dielectric strength of several tens of KV1 degree or more, and a wound core with an insulating tape or insulating coating applied between the layers to suppress eddy current loss. , or a ferrite magnetic core is used.

Especially when used for high frequency applications of several hundred Hz or more,
As shown in FIG. 5, a structure capable of oil cooling is used. In the figure, 21 is an input end or an output end, 22 is a coaxial cylindrical conductor, 23 is an output end or an input end, 24 is an oil inlet, 25 is an oil outlet, 26 is a saturable magnetic core, and 27 is a saturable magnetic core (support). The running insulating link 28 is an insulator for insulating the input and output ends and sealing oil. In this saturable reactor, the magnetic core is cooled by circulating oil using a pump.

[Problem that the invention seeks to solve]

In the saturable reactor for an oil-cooled daytime voltage pulse generator according to the above-mentioned conventional technology, when the repetition frequency is increased (for example, about IKHz or more), a heat spot is generated in the saturable magnetic core due to core loss, and the saturable reactor cannot be used as a saturable reactor. The characteristics deteriorate in a short period of time after the start of operation, and in extreme cases, the magnetic characteristics at the location where the heat spot occurs will deteriorate significantly, and the initial characteristics will not be exhibited when restarted after the operation has stopped. The problem is that you can't get it. It is well known that the deterioration of magnetic properties due to the generation of heat spots is particularly noticeable when an amorphous magnetic ribbon is used.

[Means for solving problems]

The present invention uses an amorphous magnetic ribbon or the like to increase the dielectric strength to several tens of kilovolts.
In order to achieve this, we decided to use a saturable magnetic core with a structure in which multiple wound magnetic cores of different dimensions with insulating tape or insulating coating applied between the layers are arranged concentrically, and a cooling reservoir gap is provided between each wound magnetic core. The present invention provides a saturable reactor for a high-voltage pulse generator that significantly improves the cooling efficiency of a υ magnetic core.

〔Example〕

The present invention will be explained below using examples.

FIG. 1 is a sectional view of an embodiment of a saturable reactor for a high voltage pulse generator according to the present invention. In the figure, 1 is an input end or an output end, 2 is a coaxial cylindrical conductor, 6 is an output end or an input end, 4 is an oil inlet, 5 is an oil outlet, 6 is an amorphous magnetic ribbon, and insulating tape or The wound magnetic core is coated with an insulating coating, 7 is a gap provided to improve the cooling efficiency of the wound magnetic core 6, and 8 is a space provided to prevent the wound magnetic core and the coaxial cylindrical conductor from coming into contact with each other, and the end face of the wound magnetic core is evenly cooled with oil. 9 is an insulator having the function of insulating the input and output terminals and sealing oil. Also,
In the figure, cooling oil flows from an oil inlet 4 along a path shown by an arrow in the figure, cools the end face of each magnetic core uniformly, exits an oil outlet 5, and is circulated by IP to a pump. In this example, silicone oil with a viscosity of 5-/S was used as the cooling oil.

Figure 2Fi shows the number of poles of the saturable magnetic core used in Figure 1, and in this example, the number of poles of the saturable magnetic core used in Figure 1 is 6.
An annular gap 7-1 and 7-2 for cooling is provided by the wound magnetic cores 6-1, 6-2, and 6-3, and adjacent wound magnetic cores are placed in the annular gap for cooling. It is fixed by inserting an insulating spacer.

Figure 6 shows the wound magnetic core (5-1, 6-2゜6-6
In this example, stainless steel links 12 and 16 are used to prevent the wound core 11, which is formed by insulating the layers of amorphous magnetic ribbon with polyester film tape, from being deformed. The inner circumference and outer circumference of each wound magnetic core 11 are fixed.

FIG. 4 shows the structure of the insulator guide 8 used in FIG. 1 to prevent contact between the wound magnetic core and the coaxial cylindrical conductor and to uniformly cool the end face of the wound magnetic core with oil. . In this example, 14 and 15 are spacer parts to prevent the wound magnetic core and the coaxial cylindrical conductor from coming into contact with each other.
Numeral 6 denotes air gaps for determining the flow direction of the cooling oil, which are provided in large numbers at positions where the end faces of the wound magnetic core can be uniformly cooled.

By adopting the above structure, the surface area of the saturable magnetic core can be increased, and an improvement in cooling efficiency against heat generated by core loss during operation can be expected. In addition, in the case of a wound magnetic core, especially in the case of a wound magnetic core with interlayer insulation as in this example, the thermal conductivity in the radial direction of the magnetic core is significantly lower than that in the direction perpendicular to the radial direction of the magnetic core. In order to increase the cold koji efficiency, it is considered effective to use a structure that can uniformly cool the end face of the magnetic core, as in this example.

Table 1 shows the compression ratio (in FIG. 6) when the saturable reactor for the high voltage pulse generator according to this embodiment and the conventional example shown in FIG.
Capacitor 3 generated after thyratron 64 turns on
The value obtained by dividing the pulse width of the terminal voltage 7 of - by the pulse width of the terminal voltage 1 of the capacitor 69. ) is a comparative example of the change over time.

In the present invention, the time change in the compression ratio is extremely small and has sufficient characteristics for practical use, whereas in the conventional example, the compression ratio is reduced due to a decrease in the saturation magnetic flux density of the saturable magnetic core mainly due to the influence of heat spots generated inside the magnetic core. It can be seen that a significant decrease has occurred.

Table 2 shows the compression ratio at the time of resumption of operation when the same equipment as in Table 1 was operated for 5 minutes under the same conditions, and after sufficient time had elapsed for the saturable magnetic core to cool down, it was operated at low temperature. This shows the change in characteristics depending on the number of operations. It can be seen that the compression ratio in the case of the present invention does not depend on the number of operations, whereas in the conventional example, the saturable core magnetic characteristics deteriorate due to heat spots during operation.

Table 1 Capacity of capacitor Vi=DC30KV Capacitor t: Capacitors 36, 37, and 39 are all 15 nF Possible' ML Average magnetic path length used 3
80X10 m Repetition frequency I KHz Table 2 Human crab Vi-DC30KV Capacity: Capacitor! +6, 37, 39 are all 15nF Saturable reactor (same as below for both the present invention and conventional example) Cobalt-based amorphous effective cross-sectional area 1.2X10 - 4 pieces used Average magnetic path length
380 x 10 m <Return frequency IKHz Single operation time 5 minutes [Effects of the invention] As explained above, according to the present invention, since the magnetic core can be effectively cooled, a wound magnetic core is used. It becomes possible to prevent the occurrence of heat spots, which was a problem in the saturable reactor for an oil-cooled high-voltage pulse generator.

In particular, when a material such as an amorphous magnetic ribbon is used for the magnetic core, whose characteristics change irreversibly due to heat shock, it is possible to prevent characteristic deterioration due to crystallization or alteration in the poles of the magnetic core due to the generation of heat spots. There are also other effects.

Furthermore, since there is little characteristic deterioration due to high nine-turn operation, it can be used in applications requiring high < nine-turn operation, which have not been used in the past.

[Brief explanation of the drawing]

FIG. 1 is a structural sectional view showing an embodiment of a saturable reactor for a high voltage pulse generator according to the present invention, and FIG. 2 is a structural diagram of a saturable magnetic core constructed using wound cores of different dimensions in the present invention. Fig. 6 is a structural diagram of a wound magnetic core that constitutes a saturable magnetic core according to the present invention, and Fig. 4 is a structural diagram of an insulator that prevents contact between the saturable magnetic core and a coaxial cylindrical conductor according to the present invention and also serves as a guide for cooling oil. , Fig. 5 is a cross-sectional view of the structure of a saturable reactor for a conventional high-voltage pulse generator, Fig. 6 is a circuit block diagram of an excimer laser having a magnetic compression type high-voltage pulse generation circuit, and Fig. 7 is a magnetically assisted type excimer laser. FIG. 2 is a configuration diagram of an excimer laser circuit having a high voltage pulse generation circuit.

Claims (9)

[Claims] (1) In a saturable reactor for a high-voltage pulse generator, a plurality of wound magnetic cores with different dimensions are used as the saturable magnetic core, and the dimensions are such that when arranged concentrically, air gaps are created between each magnetic core for cooling. A saturable reactor for a high voltage pulse generator, characterized by using a saturable magnetic core arranged concentrically. (2) In the saturable reactor for a high-voltage pulse generator according to claim 1, a plurality of saturable magnetic cores configured by concentrically arranging a plurality of wound magnetic cores having different dimensions is used in combination. A saturable reactor for a high voltage pulse generator, characterized by: (3) In the saturable reactor for a high voltage pulse generator according to claim 1 or 2, a configuration is provided to uniformly cool the end face of the wound core, and the core loss due to the core loss during operation is provided. A saturable reactor for a high voltage pulse generator characterized by preventing the generation of heat spots. (4) In the saturable reactor for a high voltage pulse generator according to claims 1 to 3, the saturable reactor is composed of an insulator for uniformly cooling the wound core in the direction of the end face of the wound magnetic core. A saturable reactor for a high voltage generator, characterized in that it is provided with a guided guide. (5) In the saturable reactor for a high voltage pulse generator according to claims 1 to 4, each of the plurality of wound magnetic cores having different dimensions arranged concentrically has an inner periphery and an outer periphery. A saturable reactor for a high voltage pulse generator, characterized in that a fixed link is provided to prevent deformation of the reactor. (6) In the saturable reactor for a high voltage pulse generator according to claims 1 to 5, the plurality of wound cores having different dimensions arranged concentrically are arranged between adjacent wound cores. A saturable reactor for a high voltage pulse generator, characterized in that the reactor is fixed by a spacer provided in a gap for cooling. (7) In the saturable reactor for a high voltage pulse generator according to claims 1 to 6, the saturable magnetic core is a winding formed by applying an insulating tape or an insulating coating between layers of magnetic ribbon. A saturable reactor for a high voltage pulse generator characterized by using a magnetic core. (8) A saturable reactor for a high voltage pulse generator according to claims 1 to 7, characterized in that an amorphous magnetic ribbon is used as the saturable reactor. Saturation reactor available for use. (9) In the saturable reactor for a high voltage pulse generator according to claims 18 to 8, transformer oil;
Alternatively, a saturable reactor for a high voltage pulse generator, characterized in that the saturable magnetic core is cooled using insulating oil such as silicone oil.