JPH01157156U - - Google Patents

Info

Publication number
JPH01157156U
JPH01157156U JP5421388U JP5421388U JPH01157156U JP H01157156 U JPH01157156 U JP H01157156U JP 5421388 U JP5421388 U JP 5421388U JP 5421388 U JP5421388 U JP 5421388U JP H01157156 U JPH01157156 U JP H01157156U
Authority
JP
Japan
Prior art keywords
disk
ion beam
ion
transmission window
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5421388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5421388U priority Critical patent/JPH01157156U/ja
Publication of JPH01157156U publication Critical patent/JPH01157156U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5421388U 1988-04-21 1988-04-21 Pending JPH01157156U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5421388U JPH01157156U (enrdf_load_stackoverflow) 1988-04-21 1988-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5421388U JPH01157156U (enrdf_load_stackoverflow) 1988-04-21 1988-04-21

Publications (1)

Publication Number Publication Date
JPH01157156U true JPH01157156U (enrdf_load_stackoverflow) 1989-10-30

Family

ID=31280148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5421388U Pending JPH01157156U (enrdf_load_stackoverflow) 1988-04-21 1988-04-21

Country Status (1)

Country Link
JP (1) JPH01157156U (enrdf_load_stackoverflow)

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