JPH01156742U - - Google Patents
Info
- Publication number
- JPH01156742U JPH01156742U JP5392688U JP5392688U JPH01156742U JP H01156742 U JPH01156742 U JP H01156742U JP 5392688 U JP5392688 U JP 5392688U JP 5392688 U JP5392688 U JP 5392688U JP H01156742 U JPH01156742 U JP H01156742U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- stop valve
- pipe
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 10
- 239000002994 raw material Substances 0.000 claims description 10
- 230000008016 vaporization Effects 0.000 claims description 4
- 238000009834 vaporization Methods 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010926 purge Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5392688U JPH01156742U (ru) | 1988-04-21 | 1988-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5392688U JPH01156742U (ru) | 1988-04-21 | 1988-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156742U true JPH01156742U (ru) | 1989-10-27 |
Family
ID=31279880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5392688U Pending JPH01156742U (ru) | 1988-04-21 | 1988-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156742U (ru) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03208889A (ja) * | 1990-01-11 | 1991-09-12 | Toshiba Corp | 液体ソース容器 |
| US7453096B2 (en) | 2001-03-27 | 2008-11-18 | Ricoh Company, Ltd. | Method of fabricating a semiconductor light-emitting device |
| US7518161B2 (en) | 2001-03-27 | 2009-04-14 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
| US7968362B2 (en) | 2001-03-27 | 2011-06-28 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
-
1988
- 1988-04-21 JP JP5392688U patent/JPH01156742U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03208889A (ja) * | 1990-01-11 | 1991-09-12 | Toshiba Corp | 液体ソース容器 |
| US7453096B2 (en) | 2001-03-27 | 2008-11-18 | Ricoh Company, Ltd. | Method of fabricating a semiconductor light-emitting device |
| US7518161B2 (en) | 2001-03-27 | 2009-04-14 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
| US7968362B2 (en) | 2001-03-27 | 2011-06-28 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
| US8293555B2 (en) | 2001-03-27 | 2012-10-23 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |