JPH01156742U - - Google Patents
Info
- Publication number
- JPH01156742U JPH01156742U JP5392688U JP5392688U JPH01156742U JP H01156742 U JPH01156742 U JP H01156742U JP 5392688 U JP5392688 U JP 5392688U JP 5392688 U JP5392688 U JP 5392688U JP H01156742 U JPH01156742 U JP H01156742U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- stop valve
- pipe
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 10
- 239000002994 raw material Substances 0.000 claims description 10
- 230000008016 vaporization Effects 0.000 claims description 4
- 238000009834 vaporization Methods 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010926 purge Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Description
第１図および第２図は本考案の一実施例を示す
原料ガスの気化容器の正面図、第３図乃至第６図
は従来の原料ガスの気化容器の正面図、第７図は
第６図の要部拡大図である。
１…容器本体、２，７…ストツプバルブ、３…
導入管、４…原料、５…キヤリヤーガス、６…原
料ガス、８…供給管、９，９′…接手、１０…補
助配管、１１，１３…バイパスバルブ、１２，１
２′…ガス溜り、１４…三方弁。
1 and 2 are front views of a raw material gas vaporization container showing an embodiment of the present invention, FIGS. 3 to 6 are front views of conventional raw material gas vaporization containers, and FIG. It is an enlarged view of the main part of the figure. 1... Container body, 2, 7... Stop valve, 3...
Inlet pipe, 4... Raw material, 5... Carrier gas, 6... Raw material gas, 8... Supply pipe, 9, 9'... Joint, 10... Auxiliary pipe, 11, 13... Bypass valve, 12, 1
2'...Gas reservoir, 14...Three-way valve.
Claims (1)
る容器にキヤリヤーガスを導入するストツプバル
ブを有する導入管を備え、該導入管からキヤリヤ
ーガスを導入し、原料を気化または昇華させて原
料ガスとし、該原料ガスを反応炉に供給するスト
ツプバルブを有する供給管とを備えた原料ガスの
気化容器において、前記導入管および供給管のス
トツプバルブに近接して、パージガスを導入、排
出するストツプバルブを有する配管を設けたこと
を特徴とする原料ガスの気化容器。 An introduction pipe with a stop valve is provided for introducing a carrier gas into a container containing a liquid or solid raw material to be a raw material gas, and the carrier gas is introduced from the introduction pipe, and the raw material is vaporized or sublimated to become a raw material gas, and the raw material gas is A source gas vaporization container equipped with a supply pipe having a stop valve for supplying the reactor to the reactor, characterized in that a pipe having a stop valve for introducing and discharging purge gas is provided in proximity to the stop valve of the introduction pipe and the supply pipe. A vaporization container for raw material gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5392688U JPH01156742U (en) | 1988-04-21 | 1988-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5392688U JPH01156742U (en) | 1988-04-21 | 1988-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156742U true JPH01156742U (en) | 1989-10-27 |
Family
ID=31279880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5392688U Pending JPH01156742U (en) | 1988-04-21 | 1988-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156742U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03208889A (en) * | 1990-01-11 | 1991-09-12 | Toshiba Corp | Liquid source container |
| US7453096B2 (en) | 2001-03-27 | 2008-11-18 | Ricoh Company, Ltd. | Method of fabricating a semiconductor light-emitting device |
| US7518161B2 (en) | 2001-03-27 | 2009-04-14 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
| US7968362B2 (en) | 2001-03-27 | 2011-06-28 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
-
1988
- 1988-04-21 JP JP5392688U patent/JPH01156742U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03208889A (en) * | 1990-01-11 | 1991-09-12 | Toshiba Corp | Liquid source container |
| US7453096B2 (en) | 2001-03-27 | 2008-11-18 | Ricoh Company, Ltd. | Method of fabricating a semiconductor light-emitting device |
| US7518161B2 (en) | 2001-03-27 | 2009-04-14 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
| US7968362B2 (en) | 2001-03-27 | 2011-06-28 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
| US8293555B2 (en) | 2001-03-27 | 2012-10-23 | Ricoh Company, Ltd. | Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system |
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