JPH01156545U - - Google Patents
Info
- Publication number
- JPH01156545U JPH01156545U JP5320288U JP5320288U JPH01156545U JP H01156545 U JPH01156545 U JP H01156545U JP 5320288 U JP5320288 U JP 5320288U JP 5320288 U JP5320288 U JP 5320288U JP H01156545 U JPH01156545 U JP H01156545U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment apparatus
- integrated circuit
- semiconductor integrated
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000002791 soaking Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5320288U JPH01156545U (es) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5320288U JPH01156545U (es) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156545U true JPH01156545U (es) | 1989-10-27 |
Family
ID=31279194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5320288U Pending JPH01156545U (es) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156545U (es) |
-
1988
- 1988-04-19 JP JP5320288U patent/JPH01156545U/ja active Pending