JPH01156541U - - Google Patents
Info
- Publication number
- JPH01156541U JPH01156541U JP5498588U JP5498588U JPH01156541U JP H01156541 U JPH01156541 U JP H01156541U JP 5498588 U JP5498588 U JP 5498588U JP 5498588 U JP5498588 U JP 5498588U JP H01156541 U JPH01156541 U JP H01156541U
- Authority
- JP
- Japan
- Prior art keywords
- organic film
- gas
- chemical solution
- substrate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000001784 detoxification Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5498588U JPH01156541U (cs) | 1988-04-21 | 1988-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5498588U JPH01156541U (cs) | 1988-04-21 | 1988-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156541U true JPH01156541U (cs) | 1989-10-27 |
Family
ID=31280893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5498588U Pending JPH01156541U (cs) | 1988-04-21 | 1988-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156541U (cs) |
-
1988
- 1988-04-21 JP JP5498588U patent/JPH01156541U/ja active Pending