JPH01154629U - - Google Patents
Info
- Publication number
- JPH01154629U JPH01154629U JP5163088U JP5163088U JPH01154629U JP H01154629 U JPH01154629 U JP H01154629U JP 5163088 U JP5163088 U JP 5163088U JP 5163088 U JP5163088 U JP 5163088U JP H01154629 U JPH01154629 U JP H01154629U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- insulating film
- gate electrode
- source
- interlayer insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011229 interlayer Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5163088U JPH01154629U (th) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5163088U JPH01154629U (th) | 1988-04-19 | 1988-04-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01154629U true JPH01154629U (th) | 1989-10-24 |
Family
ID=31277649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5163088U Pending JPH01154629U (th) | 1988-04-19 | 1988-04-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01154629U (th) |
-
1988
- 1988-04-19 JP JP5163088U patent/JPH01154629U/ja active Pending