JPH01154460U - - Google Patents
Info
- Publication number
- JPH01154460U JPH01154460U JP5175288U JP5175288U JPH01154460U JP H01154460 U JPH01154460 U JP H01154460U JP 5175288 U JP5175288 U JP 5175288U JP 5175288 U JP5175288 U JP 5175288U JP H01154460 U JPH01154460 U JP H01154460U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- diaphragm
- mesa portion
- actuator
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5175288U JPH05619Y2 (en, 2012) | 1988-04-18 | 1988-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5175288U JPH05619Y2 (en, 2012) | 1988-04-18 | 1988-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01154460U true JPH01154460U (en, 2012) | 1989-10-24 |
| JPH05619Y2 JPH05619Y2 (en, 2012) | 1993-01-08 |
Family
ID=31277768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5175288U Expired - Lifetime JPH05619Y2 (en, 2012) | 1988-04-18 | 1988-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05619Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005003200A (ja) * | 2003-06-11 | 2005-01-06 | Lg Electron Inc | マイクロアクチュエータ及びその製造方法並びにマイクロ作動バルブ |
-
1988
- 1988-04-18 JP JP5175288U patent/JPH05619Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005003200A (ja) * | 2003-06-11 | 2005-01-06 | Lg Electron Inc | マイクロアクチュエータ及びその製造方法並びにマイクロ作動バルブ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05619Y2 (en, 2012) | 1993-01-08 |