JPH01153635U - - Google Patents

Info

Publication number
JPH01153635U
JPH01153635U JP4660388U JP4660388U JPH01153635U JP H01153635 U JPH01153635 U JP H01153635U JP 4660388 U JP4660388 U JP 4660388U JP 4660388 U JP4660388 U JP 4660388U JP H01153635 U JPH01153635 U JP H01153635U
Authority
JP
Japan
Prior art keywords
slit
thermocouple
thin film
barrel
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4660388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0627947Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4660388U priority Critical patent/JPH0627947Y2/ja
Publication of JPH01153635U publication Critical patent/JPH01153635U/ja
Application granted granted Critical
Publication of JPH0627947Y2 publication Critical patent/JPH0627947Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP4660388U 1988-04-05 1988-04-05 薄膜気相成長装置における熱電対支持装置 Expired - Lifetime JPH0627947Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4660388U JPH0627947Y2 (ja) 1988-04-05 1988-04-05 薄膜気相成長装置における熱電対支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4660388U JPH0627947Y2 (ja) 1988-04-05 1988-04-05 薄膜気相成長装置における熱電対支持装置

Publications (2)

Publication Number Publication Date
JPH01153635U true JPH01153635U (US20020051482A1-20020502-M00012.png) 1989-10-23
JPH0627947Y2 JPH0627947Y2 (ja) 1994-07-27

Family

ID=31272870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4660388U Expired - Lifetime JPH0627947Y2 (ja) 1988-04-05 1988-04-05 薄膜気相成長装置における熱電対支持装置

Country Status (1)

Country Link
JP (1) JPH0627947Y2 (US20020051482A1-20020502-M00012.png)

Also Published As

Publication number Publication date
JPH0627947Y2 (ja) 1994-07-27

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