JPH01151196U - - Google Patents
Info
- Publication number
- JPH01151196U JPH01151196U JP4842988U JP4842988U JPH01151196U JP H01151196 U JPH01151196 U JP H01151196U JP 4842988 U JP4842988 U JP 4842988U JP 4842988 U JP4842988 U JP 4842988U JP H01151196 U JPH01151196 U JP H01151196U
- Authority
- JP
- Japan
- Prior art keywords
- surface layer
- wall
- silicon carbide
- crucible
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002344 surface layer Substances 0.000 claims description 6
- 239000010410 layer Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims 3
- 229910021426 porous silicon Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4842988U JPH01151196U (enrdf_load_stackoverflow) | 1988-04-11 | 1988-04-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4842988U JPH01151196U (enrdf_load_stackoverflow) | 1988-04-11 | 1988-04-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01151196U true JPH01151196U (enrdf_load_stackoverflow) | 1989-10-18 |
Family
ID=31274580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4842988U Pending JPH01151196U (enrdf_load_stackoverflow) | 1988-04-11 | 1988-04-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01151196U (enrdf_load_stackoverflow) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034318A (enrdf_load_stackoverflow) * | 1973-07-30 | 1975-04-02 | ||
JPS5941472A (ja) * | 1982-08-31 | 1984-03-07 | Ibiden Co Ltd | 黒鉛ルツボ |
-
1988
- 1988-04-11 JP JP4842988U patent/JPH01151196U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034318A (enrdf_load_stackoverflow) * | 1973-07-30 | 1975-04-02 | ||
JPS5941472A (ja) * | 1982-08-31 | 1984-03-07 | Ibiden Co Ltd | 黒鉛ルツボ |