JPH01151148U - - Google Patents
Info
- Publication number
- JPH01151148U JPH01151148U JP4780188U JP4780188U JPH01151148U JP H01151148 U JPH01151148 U JP H01151148U JP 4780188 U JP4780188 U JP 4780188U JP 4780188 U JP4780188 U JP 4780188U JP H01151148 U JPH01151148 U JP H01151148U
- Authority
- JP
- Japan
- Prior art keywords
- grating
- outlet
- mesh
- suction port
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4780188U JPH01151148U (tr) | 1988-04-11 | 1988-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4780188U JPH01151148U (tr) | 1988-04-11 | 1988-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01151148U true JPH01151148U (tr) | 1989-10-18 |
Family
ID=31273986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4780188U Pending JPH01151148U (tr) | 1988-04-11 | 1988-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01151148U (tr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6191433A (ja) * | 1984-10-11 | 1986-05-09 | Hitachi Ltd | クリ−ンル−ム |
| JPS61202028A (ja) * | 1985-03-06 | 1986-09-06 | Kiyohiro Eng:Kk | 除塵装置内蔵の壁部材 |
-
1988
- 1988-04-11 JP JP4780188U patent/JPH01151148U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6191433A (ja) * | 1984-10-11 | 1986-05-09 | Hitachi Ltd | クリ−ンル−ム |
| JPS61202028A (ja) * | 1985-03-06 | 1986-09-06 | Kiyohiro Eng:Kk | 除塵装置内蔵の壁部材 |