JPH01149645U - - Google Patents
Info
- Publication number
- JPH01149645U JPH01149645U JP4572688U JP4572688U JPH01149645U JP H01149645 U JPH01149645 U JP H01149645U JP 4572688 U JP4572688 U JP 4572688U JP 4572688 U JP4572688 U JP 4572688U JP H01149645 U JPH01149645 U JP H01149645U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- end surface
- adhesive layer
- pressure
- sensitive adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 4
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4572688U JPH01149645U (ar) | 1988-04-06 | 1988-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4572688U JPH01149645U (ar) | 1988-04-06 | 1988-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01149645U true JPH01149645U (ar) | 1989-10-17 |
Family
ID=31272026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4572688U Pending JPH01149645U (ar) | 1988-04-06 | 1988-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01149645U (ar) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006119477A (ja) * | 2004-10-22 | 2006-05-11 | Lasertec Corp | マスク構造体及びそれを用いた半導体デバイスの製造方法 |
-
1988
- 1988-04-06 JP JP4572688U patent/JPH01149645U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006119477A (ja) * | 2004-10-22 | 2006-05-11 | Lasertec Corp | マスク構造体及びそれを用いた半導体デバイスの製造方法 |
| JP4512782B2 (ja) * | 2004-10-22 | 2010-07-28 | レーザーテック株式会社 | マスク構造体及びそれを用いた半導体デバイスの製造方法 |