JPH01149436U - - Google Patents
Info
- Publication number
- JPH01149436U JPH01149436U JP4632688U JP4632688U JPH01149436U JP H01149436 U JPH01149436 U JP H01149436U JP 4632688 U JP4632688 U JP 4632688U JP 4632688 U JP4632688 U JP 4632688U JP H01149436 U JPH01149436 U JP H01149436U
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- graphite
- crucible
- container
- synthesis apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000565 sealant Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4632688U JPH0623533Y2 (ja) | 1988-04-06 | 1988-04-06 | 化合物半導体多結晶合成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4632688U JPH0623533Y2 (ja) | 1988-04-06 | 1988-04-06 | 化合物半導体多結晶合成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01149436U true JPH01149436U (enrdf_load_stackoverflow) | 1989-10-17 |
JPH0623533Y2 JPH0623533Y2 (ja) | 1994-06-22 |
Family
ID=31272597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4632688U Expired - Lifetime JPH0623533Y2 (ja) | 1988-04-06 | 1988-04-06 | 化合物半導体多結晶合成装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0623533Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-04-06 JP JP4632688U patent/JPH0623533Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0623533Y2 (ja) | 1994-06-22 |