JPH01149024A - Acoustooptic element - Google Patents

Acoustooptic element

Info

Publication number
JPH01149024A
JPH01149024A JP30914187A JP30914187A JPH01149024A JP H01149024 A JPH01149024 A JP H01149024A JP 30914187 A JP30914187 A JP 30914187A JP 30914187 A JP30914187 A JP 30914187A JP H01149024 A JPH01149024 A JP H01149024A
Authority
JP
Japan
Prior art keywords
light
plane
acousto
optic
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30914187A
Other languages
Japanese (ja)
Inventor
Fumio Tanaka
文雄 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP30914187A priority Critical patent/JPH01149024A/en
Publication of JPH01149024A publication Critical patent/JPH01149024A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain an acoustooptic element of low cost and high reliability requiring no reflection preventing film by setting angles of light incidence and emission of an acoustooptic medium in the vicinity of Brewster angle and making light incidence and emission faces parallel with each other and forming the acoustooptic medium so that the the wave surface of an ultrasonic wave coincides with an average direction of the incident light and the diffracted light in the acoustooptic medium. CONSTITUTION:An acoustooptic medium 1 having a first face 1a to which a piezoelectric element 3 is attached and second and third faces 1b and 1c for light incidence and emission which intersect the first face 1a and are parallel with each other is so formed that the angle of intersection between second and third faces 1b and 1c and the first face 1a approximates theta=90 deg.-sin<-1>[cos{tan(n)}] [(n) is the refractive index of the acoustooptic medium), and the light is made incident with an angle approximating theta1=tan<-1> [(n) to the normal of light incidence and emission faces. Thus, the reflection preventing film is not used to realize light incidence of less reflection, and a sufficient acoustooptic effect is obtained in this state, and the reflection of the diffracted light is very reduced.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、音響光学効果によりレーザ光などの光を変調
する音響光学素子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an acousto-optic element that modulates light such as a laser beam by an acousto-optic effect.

従来の技術 音響光学素子は、音響光学媒体に圧電素子を装着した基
本構成であり、圧電素子に電気信号を入力すると、超音
波信号となって音響光学媒体中を伝搬し、ここを通る一
定角度で入射した光を回折するものである。音響光学効
果には、ガラスや単結晶材料が用いられ、先入出射の面
は光学研ばされるが、そのままでは、空気との屈折率の
違いによりかなりの光が反射されるため、反射防止膜が
施されている。反射防止膜としては、フッ化物や酸化物
を単層または多層膜として蒸着法などによより、一定の
膜厚に付着させられたものが用いられている。
Conventional technology An acousto-optic device has a basic configuration in which a piezoelectric element is attached to an acousto-optic medium.When an electrical signal is input to the piezoelectric element, it becomes an ultrasonic signal that propagates through the acousto-optic medium, passing through the acousto-optic medium at a certain angle. It diffracts the incident light. Glass or single crystal materials are used for the acousto-optic effect, and the front input and output surfaces are optically polished, but if left as is, a considerable amount of light is reflected due to the difference in refractive index with air, so an antireflection coating is required. is applied. As the antireflection film, a single layer or multilayer film of fluoride or oxide is used, which is deposited to a certain thickness by vapor deposition or the like.

発明が解決しようとする問題点 このような従来の構成では、反射防止膜の材質を音響光
学媒体の材質に応じ選定して施す必要があり、また耐久
性のある膜を形成するためには加熱も必要となり、極め
てコストが高くなるとともに生産性が悪という問題があ
った。さらに、入射光の強度が高くなると、反射防止膜
に耐久性が無いため寿命が短かく信頼性に欠けるなどの
問題があった。
Problems to be Solved by the Invention In such a conventional configuration, it is necessary to select the material of the antireflection film depending on the material of the acousto-optic medium, and in order to form a durable film, heating is required. However, there was a problem in that the cost was extremely high and the productivity was poor. Furthermore, when the intensity of the incident light increases, the antireflection film lacks durability, resulting in short lifespan and lack of reliability.

本発明はこのような問題点を解決するもので、反射防止
膜を必要とせず、低コストで信頼性の高−一音響光学素
子を提供することを目的とするものである。
The present invention solves these problems and aims to provide a low-cost, highly reliable acousto-optic device that does not require an antireflection film.

問題点を解決するための手段 上記問題点を解決するため、本発明の音響光学素子は、
圧電素子が装着された第1の面と、この第1の面と交差
するとともに互いに平行な光入出射のための第2および
第3の面とを有する音響光学媒体の上記第2および第3
の面と第1の面との交差角がθa=90°−sin ’
(cos(tan 1(n))) (nは音響光学媒体
の屈曲率)近傍となるようになすとともに、光を光入射
面の法線に対してθ1=tan(n)近傍の角度でもっ
て傾斜させて入射させるよう蚤こしたものである。
Means for Solving the Problems In order to solve the above problems, the acousto-optic element of the present invention includes:
The second and third surfaces of the acousto-optic medium have a first surface on which a piezoelectric element is mounted, and second and third surfaces for light input and output that intersect the first surface and are parallel to each other.
The intersection angle between the surface and the first surface is θa=90°−sin'
(cos(tan 1(n))) (where n is the curvature index of the acousto-optic medium), and the light is held at an angle near θ1=tan(n) with respect to the normal to the light incident surface. It is made so that it is incident at an angle.

作用 この構成により、光の反射防止膜を用いることなく、極
めて反射の少ない光入射が実現でき、その状態で十分な
音響光学効果が超音波信号により得られて、回折された
光も入射光同様極めて反射の少ない状態となる。したが
って、反射防止膜は不要となる。また、出射光の方位は
入射光軸の近傍となる。
Effect: With this configuration, it is possible to achieve light incidence with extremely low reflection without using an anti-reflection film, and in this state, a sufficient acousto-optic effect can be obtained by the ultrasonic signal, and the diffracted light is similar to the incident light. This results in extremely low reflection. Therefore, an antireflection film is not required. Further, the direction of the emitted light is near the incident optical axis.

実施例 以下、本発明の一実施例を図面に基づき説明する。Example Hereinafter, one embodiment of the present invention will be described based on the drawings.

本発明に係る音響光学素子の要旨は、音響光学媒体への
光入出射をブルースター角の近傍に、かつ光入出射面を
互いにほぼ平行にするとともに、音響光学媒体内での入
感射光と回折光との平均方位に対し、超音波の波面が一
致するように形成したものである。
The gist of the acousto-optic element according to the present invention is to make the light input and output from the acousto-optic medium near Brewster's angle, to make the light input and output surfaces almost parallel to each other, and to make the incident light and the incident light in the acousto-optic medium It is formed so that the wavefront of the ultrasonic wave coincides with the average direction of the diffracted light.

すなわち、第1図において、1は音響光学媒体で、その
第1の面laには高周波電気信号源2に接続された圧電
素子3が有機接着剤または金属により装着されている。
That is, in FIG. 1, 1 is an acousto-optic medium, and a piezoelectric element 3 connected to a high frequency electric signal source 2 is attached to a first surface la of the medium using an organic adhesive or metal.

この第1の面1aの両端部において、第1の面1 mと
所定角度θaでもって交差するとともに光入出射面であ
る第2および第3の面1b。
At both ends of this first surface 1a, second and third surfaces 1b intersect with the first surface 1m at a predetermined angle θa and are light input/output surfaces.

1cは互いに平行にされている。そして、入射光は、第
2の面1bに、その法線aに対して所定角度θ1で入射
されるが、この角度θ1は、音響光学媒体lの屈折率を
nとすると、 θs=  tan    (n)          
・−・   (1)の条件を満たす角度近傍とされる。
1c are parallel to each other. Then, the incident light is incident on the second surface 1b at a predetermined angle θ1 with respect to the normal a, and this angle θ1 is calculated as follows, where n is the refractive index of the acousto-optic medium l, θs=tan ( n)
--- It is assumed to be near the angle that satisfies the condition (1).

例えば、音響光学媒体に二酸化テルル結晶を用い、入射
光にヘリウムネオンレーザ光(波長63λ8mm)を用
いると、n=Z26 、θ1”36&1’となる。この
近傍での光反射率は第2図に示したようになる。
For example, if a tellurium dioxide crystal is used as the acousto-optic medium and a helium neon laser beam (wavelength 63λ8mm) is used as the incident light, n=Z26 and θ1''36&1'.The light reflectance in this vicinity is shown in Figure 2. It will be as shown.

ところで、入射する光の屈折角θ、はスネルの法則と(
1)弐jり次式となる。
By the way, the refraction angle θ of incident light is determined by Snell's law and (
1) The following equation is obtained.

+!12=sin ’((sinθt)/n) = s
in−1(cosθ1)   ・−・−・(2)この角
度θ2に超音波の波面を一致させるために、第1の面1
aと第2の面lbとのなす上記所定角度θaはθa=9
0°−1.n=となる。すなわち、θa=90°−si
n−1(cosθ1)=90°−sin ’(cos(
tan−1(n)))・・・・・・(3) 近傍となる。
+! 12=sin'((sinθt)/n)=s
in-1 (cos θ1) ・−・−・(2) In order to match the wavefront of the ultrasound to this angle θ2, the first surface 1
The predetermined angle θa between a and the second surface lb is θa=9
0°-1. n=. That is, θa=90°−si
n-1(cosθ1)=90°-sin'(cos(
tan-1(n)))...(3) neighborhood.

一方、音響光学効果による光の回折は、真空中の光の波
長λい超音波の周波数f1音遷光学媒体中の超音波の伝
搬速度Vとすると、光入射条件満たす角1度(ブラッグ
角)θbは θb = sin−’ (λo ・f/ 2nv ) 
  ・−・・・・(4)となる。上述の例でλ。=63
λ8 nm 、 f = 100!1iHz 、n=2
.26 、 V = 42eorry’sとすると、θ
b=0.19° となる。
On the other hand, light diffraction due to the acousto-optic effect occurs when the wavelength of light in vacuum is λ, the frequency of ultrasound is f1, and the propagation speed of ultrasound in an optical medium is V, then the angle of 1 degree (Bragg angle) that satisfies the light incidence condition is θb is θb = sin-' (λo ・f/2nv)
...(4). λ in the example above. =63
λ8 nm, f=100!1iHz, n=2
.. 26, V = 42eorry's, θ
b=0.19°.

光の回折は、超音波の波面に対し、入射光と対称に回折
光が発生し、入射光との分離角は2θbとなる。
In light diffraction, diffracted light is generated symmetrically with the incident light with respect to the wavefront of the ultrasonic wave, and the separation angle from the incident light is 2θb.

したがって、ブラッグ角の設定のために角度を動かせた
場合でも、十分光反射率の少ない状態を保つことが可能
となる。音響光学媒体1の光出射面である第3の面1c
における回折光の出射条件も同様であり、また、第2.
第3の百1b 、 1(が平行であるため、対称性によ
り音響光学媒体による回折光の出射方位に対する影響を
相殺することができる。第2.第3の光入出射面を逆に
しても全く同様である。
Therefore, even if the angle can be moved to set the Bragg angle, it is possible to maintain a state in which the light reflectance is sufficiently low. Third surface 1c that is the light exit surface of the acousto-optic medium 1
The conditions for emitting the diffracted light in the second.
Since the third 1b and 1( are parallel, the influence of the acousto-optic medium on the output direction of the diffracted light can be canceled out due to the symmetry. Even if the 2nd and 3rd light input/output surfaces are reversed, It's exactly the same.

ところで、前影光学媒体1と、して二酸化テルル(Te
Ox)結晶を用いた場合、第1の面1aを(0013面
とし、第2.第3の面1b、 1(をその法線が(11
03面または〔1〒0」面上に存在する面とし、入射さ
せる光の電界振動面が〔001〕軸に平行な直線偏光と
される0また、音響光学媒体1としてモリ・ブデン酸鉛
(PbMoO4)結晶を用いた場合、第1の面1aを〔
0013面とし、第2.第3の面1b、lcをその法線
が〔100〕面または〔010〕面上に存在する面とし
、入射させる光の電界振動面が(001)軸に平行な直
線偏光とされる。
By the way, the front shadow optical medium 1 is made of tellurium dioxide (Te
When using an Ox) crystal, the first plane 1a is the (0013 plane), and the normal to the second and third planes 1b and 1( is (11
The surface exists on the 03 plane or the [1〒0] plane, and the electric field vibration plane of the incident light is linearly polarized light parallel to the [001] axis. When using PbMoO4) crystal, the first surface 1a is
0013 page, and the second page. The third surfaces 1b and lc are surfaces whose normal lines lie on the [100] plane or the [010] plane, and the electric field vibration plane of the incident light is linearly polarized light parallel to the (001) axis.

発明の効果 以上のように本発明によれば、はぼ平行な光入出射面と
90°−sin ’[cos(jan 1(n))) 
 近傍の角度をなす面に圧電素子を装着して形成し、光
入射面の法線に対してjan=(n)近傍の角度でもっ
て傾斜させて光を入射させることにより、反射防止膜を
必要としない低コストで信頼性の高い音響光学素子が得
られる。
Effects of the Invention As described above, according to the present invention, the substantially parallel light input/output surface and the 90°-sin' [cos(jan 1(n)))
By attaching a piezoelectric element to a nearby angled surface and allowing the light to enter at an angle near jan=(n) with respect to the normal to the light incident surface, an antireflection film is not required. A highly reliable acousto-optic device can be obtained at low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例における音響光学素子の動作
を説明する概略構成図、第2図は光入射角と光反射率の
関係を示す特性図である。 1・・・音響光学媒体、1a・・・第1の面、1b・・
・第2の面、1c・・・第3の面、3・・・圧電素子。
FIG. 1 is a schematic configuration diagram illustrating the operation of an acousto-optic device according to an embodiment of the present invention, and FIG. 2 is a characteristic diagram showing the relationship between light incidence angle and light reflectance. 1... Acousto-optic medium, 1a... First surface, 1b...
- Second surface, 1c...Third surface, 3... Piezoelectric element.

Claims (1)

【特許請求の範囲】 1、圧電素子が装着された第1の面と、この第1の面と
交差するとともに互いに平行な光入出射のための第2お
よび第3の面とを有する音響光学媒体の上記第2および
第3の面と第1の面との交差角がθa=90゜−sin
^−^1〔cos{tan^−^1(n)}〕(nは音
響光学媒体の屈折率)近傍となるようになすとともに、
光を光入射面の法線に対してθ_1=tan^−^1(
n)近傍の角度でもって傾斜させて入射させるようにし
た音響光学素子。 2、音響光学媒体に二酸化テルル(TeO_2)結晶を
用い、第1の面を〔001〕面とし、第2、第3の面を
その法線が〔110〕面または〔1@1@0〕面上に存
在する面とし、入射させる光の電界振動面が〔001〕
軸に平行な直線偏光とした特許請求の範囲第1項に記載
の音響光学素子。 3、音響光学媒体にモリブデン酸鉛(PbMoO_4)
結晶を用い、第1の面を〔001〕面とし、第2、第3
の面をその法線が〔100〕面または〔010〕面上に
存在する面とし、入射させる光の電界振動面が〔001
〕軸に平行な直線偏光とした特許請求の範囲第1項に記
載の音響光学素子。
[Claims] 1. An acousto-optic device having a first surface on which a piezoelectric element is mounted, and second and third surfaces for light input and output that intersect the first surface and are parallel to each other. The intersection angle between the second and third surfaces of the medium and the first surface is θa=90°-sin
^-^1 [cos {tan^-^1(n)}] (n is the refractive index of the acousto-optic medium), and
θ_1=tan^-^1(
n) an acousto-optic element which allows the incident to be incident at a tilted angle; 2. A tellurium dioxide (TeO_2) crystal is used as the acousto-optic medium, the first plane is the [001] plane, and the normals of the second and third planes are the [110] plane or the [1@1@0] plane. The electric field vibration surface of the incident light is [001]
The acousto-optic element according to claim 1, wherein the light is linearly polarized parallel to the axis. 3. Lead molybdate (PbMoO_4) as acousto-optic medium
Using a crystal, the first plane is the [001] plane, and the second and third planes are the [001] plane.
Let the plane be a plane whose normal lies on the [100] plane or the [010] plane, and the electric field vibration plane of the incident light should be the [001] plane.
] The acousto-optic element according to claim 1, wherein the acousto-optic element emits linearly polarized light parallel to the axis.
JP30914187A 1987-12-07 1987-12-07 Acoustooptic element Pending JPH01149024A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30914187A JPH01149024A (en) 1987-12-07 1987-12-07 Acoustooptic element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30914187A JPH01149024A (en) 1987-12-07 1987-12-07 Acoustooptic element

Publications (1)

Publication Number Publication Date
JPH01149024A true JPH01149024A (en) 1989-06-12

Family

ID=17989398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30914187A Pending JPH01149024A (en) 1987-12-07 1987-12-07 Acoustooptic element

Country Status (1)

Country Link
JP (1) JPH01149024A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8509576B2 (en) 2008-12-18 2013-08-13 Nec Corporation Optical switch, image display device, image forming device, and method for manufacturing optical switch

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5046140A (en) * 1973-08-28 1975-04-24
JPS5199039A (en) * 1974-12-09 1976-09-01 Matsushita Electric Ind Co Ltd
JPS6083919A (en) * 1983-10-15 1985-05-13 Nippon Telegr & Teleph Corp <Ntt> Acoustooptical element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5046140A (en) * 1973-08-28 1975-04-24
JPS5199039A (en) * 1974-12-09 1976-09-01 Matsushita Electric Ind Co Ltd
JPS6083919A (en) * 1983-10-15 1985-05-13 Nippon Telegr & Teleph Corp <Ntt> Acoustooptical element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8509576B2 (en) 2008-12-18 2013-08-13 Nec Corporation Optical switch, image display device, image forming device, and method for manufacturing optical switch

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