JPH01148905A - Shape measuring machine - Google Patents
Shape measuring machineInfo
- Publication number
- JPH01148905A JPH01148905A JP30917387A JP30917387A JPH01148905A JP H01148905 A JPH01148905 A JP H01148905A JP 30917387 A JP30917387 A JP 30917387A JP 30917387 A JP30917387 A JP 30917387A JP H01148905 A JPH01148905 A JP H01148905A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- curvature
- radius
- probe
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims abstract description 24
- 238000005259 measurement Methods 0.000 claims description 28
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、極座標方式で形状測定を行う測定機に関する
。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a measuring machine that performs shape measurement using a polar coordinate method.
（従来の技術）
極座標方式の測定機は、主に回転機構上の被測定物取付
部と測定プローブから構成されている。(Prior Art) A polar coordinate measuring machine mainly consists of a measuring object mounting section on a rotating mechanism and a measuring probe.
従来は、被測定物を取付け、被測定物を回転させるから
、被測定物表面の一端に当てた測定プローブにて、被測
定物の高さ変化を測定するものでめつ友。Conventionally, since the object to be measured is attached and rotated, changes in the height of the object are measured using a measurement probe that is applied to one end of the surface of the object.
測定値としては、回転角度とその角度での被測定物の高
さ変化が得られる。この測定値から被測□定物の曲率半
径の設計値からのずれ量を算出するものでめった。As measured values, the rotation angle and the height change of the object to be measured at that angle are obtained. From this measured value, I was able to calculate the amount of deviation of the radius of curvature of the object to be measured from the designed value.
（発明が解決しようとする問題）
極座標方式の測定機においては、回転角度とその角度で
の被測定物の高さ変化が測定値として得られ、設計値の
曲率半径からのずれ量を算出出来るが、曲率半径゛を直
接測定することが出来ないという問題点が６つｔｏ
本発明の目的は、曲率半径を直接水めることが出来る極
座標方式の形状測定機にるる。(Problem to be solved by the invention) In a polar coordinate measuring machine, the rotation angle and the height change of the object to be measured at that angle are obtained as measured values, and the amount of deviation from the design value of the radius of curvature can be calculated. However, there are six problems in that the radius of curvature cannot be directly measured.The object of the present invention is to provide a polar coordinate type shape measuring machine that can directly measure the radius of curvature.
（問題を解決する几めの手段）
本発明は、回転機構と測定プローブとを有し、前記回転
機構を利用して物体の形状を測定する測定機において、
被測定物の表面を回転機構の中心軸上に一致嘔せる機構
と、一致させた状態から任意の回転半径の位置まで被測
定物の狭面を移動させることを可能にし、上記形状測定
機において、被測定物の表面を回転機構の中心軸付近で
回転させ、Ｊｉｉ定プローブの測定値の変化を最小にす
ることが出来る機構を持ち、被測定物の表面を回転機構
の中心軸上に一致させることが出来ることを特徴として
いる。(Elaborative Means for Solving the Problem) The present invention provides a measuring machine that includes a rotating mechanism and a measuring probe and that measures the shape of an object using the rotating mechanism.
The shape measuring machine has a mechanism that aligns the surface of the object to be measured with the central axis of the rotating mechanism, and a mechanism that allows the narrow surface of the object to be moved from the aligned state to a position of any rotation radius, , has a mechanism that can rotate the surface of the object to be measured near the center axis of the rotating mechanism and minimize changes in the measured values of the JII constant probe, and aligns the surface of the object to be measured on the center axis of the rotating mechanism. It is characterized by being able to
上記技術手段は、次のように作用する。被測定物を取付
は形状測定を開始する際、まず、被測定物の表面を回転
機構の中心軸上に一致させ、次に被測定物を測定プロー
ブの軸方向に、設計値の曲率半径の長さ分移動させてか
ら測定を行う。The above technical means works as follows. Mounting the object to be measured When starting shape measurement, first align the surface of the object to be measured on the central axis of the rotating mechanism, then align the object to be measured in the axial direction of the measurement probe with the designed radius of curvature. Measure after moving the length.
被測定物を上記手段を用いてから、形状測定を行うこと
により、設計時の曲率中心を中心に被測定物を回転させ
ることが出来る。By measuring the shape of the object to be measured using the above means, it is possible to rotate the object to be measured about the center of curvature at the time of design.
上記状態から被測定物を回転させ、測定プローブを当て
、被測定物の高さ変化を測定すれば、その高さ変化エフ
被測定物曲率半径の設計値からのずれ量を求めることが
出来る。被測定物は設計時の曲率中心で回転しているの
で、求めた上記ずれ量と曲率半径の設計［ぶり、被測定
物の実際の曲率半径を求めることが出来る。If the object to be measured is rotated from the above state, a measurement probe is applied, and a change in the height of the object to be measured is measured, the deviation amount of the radius of curvature of the object to be measured from the designed value can be determined. Since the object to be measured is rotating around the center of curvature at the time of design, it is possible to determine the actual radius of curvature of the object to be measured by combining the calculated deviation amount and radius of curvature.
（実施例） 以下、本発明を図面に基づいて説明する。(Example) Hereinafter, the present invention will be explained based on the drawings.
第１図は、本発明の１実施例構成図、第２図は本発明を
実施する動作の説明である。FIG. 1 is a block diagram of one embodiment of the present invention, and FIG. 2 is an explanation of the operation of implementing the present invention.
図中、１は被測定物取付部、２は微調台、４゜９はエア
ベアリング、５．１０はロータリエンコーダ、６，１１
は角度駆動装置、３は横向きロータリ、１２は水平ロー
タリ、７は水平スライダ、８はスライダ駆動装置、１３
は測定プローブ、１４は被測定物を示す。In the figure, 1 is the measurement object mounting part, 2 is the fine adjustment table, 4°9 is the air bearing, 5.10 is the rotary encoder, 6, 11
is an angle drive device, 3 is a horizontal rotary, 12 is a horizontal rotary, 7 is a horizontal slider, 8 is a slider drive device, 13
indicates a measurement probe, and 14 indicates an object to be measured.
第１図において、１は被測定物を取付ける九めの治具を
示す。２の微調台によりｘｙ軸方向に被測定物の位置の
微調整を行う。４，５．６は横向きロータリ３ｔ−構成
するものでおる。４のエアベアリングを支えにして、６
の角度駆動装置により回転させる。角度の検出は、５の
ロータリエンコーダにて行う。In FIG. 1, 1 indicates the ninth jig for mounting the object to be measured. The position of the object to be measured is finely adjusted in the x and y axis directions using the fine adjustment table No. 2. 4, 5.6 are horizontal rotary 3t-configured. Supported by air bearing 4, 6
It is rotated by an angle drive device. The angle is detected by rotary encoder 5.
９．１０，１１は水平ａ−タリ１２ｔ−構成するもので
ある。１０のエアベアリングを支えにして９０回転駆動
装置にエリ回転させる。角度の検出は１１のロータリエ
ンコーダにて行う。9. 10 and 11 constitute a horizontal a-tally 12t. It is rotated by a 90 rotation drive device using a 10 air bearing as support. The angle is detected using 11 rotary encoders.
７の水平スライダは８のスライダ駆動装置にて駆動され
る〇
次に第２図にて本発明を実施する動作の説明をする。The horizontal slider 7 is driven by a slider drive device 8. Next, referring to FIG. 2, the operation of implementing the present invention will be explained.
まず第２図１８）に示すように、被測定物１４（曲率を
有するもの、例えば非球面レンズ、球面状物体等）ｖｉ
−取付け、測定プローブ１３（非接触式又は接触式）ｔ
−当て、水平ロータリ１２ｔ−プラスマイナス同じ角度
だけ回転させ、測定プローブの高さ変化（以後測定プロ
ーブの高さ変化を高さ変化と称す）を測定する。１４ａ
は被測定物の曲率中心を、１４ｂは被測定物の表面を示
す。１４ｃ 、 １４ｄはそれぞれプラス方向マイナス
方向に回転させた時の被測定物表面の位置を示す。First, as shown in FIG. 2 18), an object to be measured 14 (something with curvature, such as an aspherical lens, a spherical object, etc.) vi
- Installation, measuring probe 13 (non-contact or contact type)
- Rotate the horizontal rotary 12t by the same angle plus or minus, and measure the height change of the measurement probe (hereinafter, the height change of the measurement probe will be referred to as height change). 14a
indicates the center of curvature of the object to be measured, and 14b indicates the surface of the object to be measured. 14c and 14d indicate the position of the surface of the object to be measured when rotated in the plus direction and the minus direction, respectively.
プラス方向マイナス方向に回転させた時の高さ変化が対
称になるよう、ｔｘ高さ変化が最小になるように、微調
台２、水平駆動装置８を用いて、被測定物１３の位置ｔ
−調整する（第２図（ｂ）参照）。The position t of the object to be measured 13 is adjusted using the fine adjustment table 2 and the horizontal drive device 8 so that the height change when rotated in the positive direction and the negative direction is symmetrical, and the height change in tx is minimized.
-Adjust (see Figure 2(b)).
次に横向きａ−タ１３３４−９０°回転させ同様釦位置
合わせを行う。これにより、被測定物表面１４ｂ ’ｉ
水平ロータリの回転中心１２ａの延長線上に一致させ、
かつ被測定物の曲率中心１４ａ ｆ測定プローブ１３の
延長線上に位置決めすることが出来る。この時の測定プ
ローブ位置をゼロに設定しておく。Next, the horizontal a-tater 1334 is rotated 90 degrees and the buttons are aligned in the same manner. As a result, the surface of the object to be measured 14b'i
Coincide with the extension line of the rotation center 12a of the horizontal rotary,
Moreover, the center of curvature 14a of the object to be measured can be positioned on the extension line of the measuring probe 13. At this time, set the measurement probe position to zero.
次に、第２図（（り （ｄ）に示すように、被測定物１
４を測定プａ−プ１３方向に設計値の曲率半径Ｒ分だけ
移動させる。すなわち凸面状の被測定物なら測定プａ−
プ側へ、凹面状の被測定物なら反測定プローブ側へ移動
させる。この時の測定プローブ１３の測定値はＲとなり
、かつ被測定物１４を被測定物の中心で回転させること
が出来る。この時の被測定物の回転中心は、設計時の曲
率中心でるる。被測定物１４ｔ−回転させ高さ変化を測
定することにＪ：り、設計値からの曲率半径のずれ量を
求めることが出来る。Next, as shown in Figure 2 ((d), the object to be measured 1
4 is moved in the direction of the measurement curve a-pu 13 by the designed radius of curvature R. In other words, if the object to be measured has a convex surface, the measurement plate a-
If the object is concave, move it to the opposite side of the measurement probe. At this time, the measurement value of the measurement probe 13 becomes R, and the object to be measured 14 can be rotated around the center of the object. The center of rotation of the object to be measured at this time is the center of curvature at the time of design. By rotating the object to be measured 14t and measuring changes in height, the amount of deviation of the radius of curvature from the design value can be determined.
簡単な一例を挙げて説明する。曲率半径凡の球面にて、
第２図のように位置合わせ七行い測定を行った場合、設
計値通フの曲率半径Ｒならば高さ変化は生じない。しか
し、設計値よυ曲率半径がずれている場合、高さ変化が
生じることになる。This will be explained using a simple example. On a spherical surface of radius of curvature,
When seven alignment measurements are performed as shown in FIG. 2, no change in height occurs if the radius of curvature R is the design value. However, if the radius of curvature deviates from the design value, a change in height will occur.
この高石変化より被測定物の曲率半径の設計値からのず
れ量を求めることが出来る。From this change in height, the amount of deviation of the radius of curvature of the object to be measured from the designed value can be determined.
（発明の効果）
以上説明してきた如く、本発明のように回転機構の中心
軸上と被測定物の表面を一致させ、その時の測定プａ−
ブの値をゼロとし、その後、被測定物を測定プローブの
軸方向に設計値の曲率半径の長さ分移動させ形状測定を
行う構成を採用しているｔめ、従来の極座標方式の形状
測定機では測定出来なかった被測定物の曲率半径を直接
測定出来るという効果が得られる。(Effects of the Invention) As explained above, according to the present invention, the central axis of the rotating mechanism and the surface of the object to be measured are made to coincide, and the measurement profile a-
This method uses a configuration in which the shape measurement is performed by setting the value of the curve to zero, and then moving the object to be measured in the axial direction of the measurement probe by the length of the designed radius of curvature. The effect is that the radius of curvature of the object to be measured, which cannot be measured with a machine, can be directly measured.
第１図は本発明の１実施例を示す斜視図、第２図は本発
明を用い比測定の概略説明図でるる。
１・・・被測定物取付部、２・・・微調台、３・・・横
向きロータリ、４・・・エアベアリング、５・・・ａ−
タリエンコーダ、６・・・角度駆動装置、７・・・水平
スライダ、８・・・エアスライダ駆動装置、９・・・角
度駆動装置、１０・・・エアベアリング、１１・・・ロ
ータリエンコーダ、１２・・・水平ロータリ、１２ａ・
・・水平ａ−タリ中心、１３・・・測定プローブ、１４
・・・被測定物、１４ａ・・・被測定物曲率中心、１４
ｂ・・・被測定物表面、１４ｃ・・・プラス方向に回転
させた時の被測定物表面の位置、１４ｄ・・・マイナス
方向に回転させた時の被測定物表面の位置、Ｒ・・・被
測定物曲率半径第１図
第２図FIG. 1 is a perspective view showing one embodiment of the present invention, and FIG. 2 is a schematic explanatory diagram of ratio measurement using the present invention. DESCRIPTION OF SYMBOLS 1...Measurement object attachment part, 2...Fine adjustment table, 3...Horizontal rotary, 4...Air bearing, 5...a-
Taly encoder, 6...Angle drive device, 7...Horizontal slider, 8...Air slider drive device, 9...Angle drive device, 10...Air bearing, 11...Rotary encoder, 12・・・Horizontal rotary, 12a・
・・Horizontal a-Tari center, 13 ・・Measurement probe, 14
...Measurement object, 14a...Measurement object curvature center, 14
b...Surface of the object to be measured, 14c...Position of the surface of the object to be measured when rotated in the positive direction, 14d...Position of the surface of the object to be measured when rotated in the negative direction, R...・Measurement object curvature radius Fig. 1 Fig. 2
Claims (2)
を利用して物体の形状を測定する測定機において、被測
定物の表面を回転機構の中心軸上に一致させる機構と、
一致させた状態から任意の回転半径の位置まで被測定物
の表面を移動可能にしたことを特徴とする形状測定機。(1) In a measuring device that includes a rotation mechanism and a measurement probe and uses the rotation mechanism to measure the shape of an object, a mechanism that aligns the surface of the object to be measured with the central axis of the rotation mechanism;
A shape measuring machine characterized by being able to move the surface of an object to be measured from a matched state to a position with an arbitrary rotation radius.
測定物の表面を回転機構の中心軸付近で回転させて、測
定プローブの測定値の変化を最小とすることが出来る機
構を持ち、被測定物の表面を回転機構の中心軸上に一致
させることが出来ることを特徴とした形状測定機。(2) The shape measuring machine according to claim (1) has a mechanism that can rotate the surface of the object to be measured near the central axis of the rotation mechanism to minimize changes in the measurement value of the measurement probe. A shape measuring machine characterized by being able to align the surface of an object to be measured with the central axis of a rotating mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30917387A JPH01148905A (en) | 1987-12-07 | 1987-12-07 | Shape measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30917387A JPH01148905A (en) | 1987-12-07 | 1987-12-07 | Shape measuring machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148905A true JPH01148905A (en) | 1989-06-12 |
Family
ID=17989811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30917387A Pending JPH01148905A (en) | 1987-12-07 | 1987-12-07 | Shape measuring machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148905A (en) |
-
1987
- 1987-12-07 JP JP30917387A patent/JPH01148905A/en active Pending
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