JPH01148082A - Driving method for ultrasonic motor - Google Patents
Driving method for ultrasonic motorInfo
- Publication number
- JPH01148082A JPH01148082A JP62307866A JP30786687A JPH01148082A JP H01148082 A JPH01148082 A JP H01148082A JP 62307866 A JP62307866 A JP 62307866A JP 30786687 A JP30786687 A JP 30786687A JP H01148082 A JPH01148082 A JP H01148082A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic motor
- voltage
- output
- signal
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 6
- 239000000919 ceramic Substances 0.000 abstract description 16
- 238000005452 bending Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000002783 friction material Substances 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
従来の技術
近年圧電セラミック等の圧電体を用いた振動体に弾性振
動を励振し、これを駆動力とした超音波モータが注目さ
れている。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Applications Prior Art In recent years, ultrasonic motors have attracted attention, in which elastic vibrations are excited in a vibrating body using a piezoelectric material such as a piezoelectric ceramic, and this vibration is used as a driving force.
以下、図面を参照しながら超音波モータの従来技術につ
いて説明を行う。Hereinafter, the conventional technology of an ultrasonic motor will be explained with reference to the drawings.
第3図は従来の超音波モータの斜視図であり、の弾性体
11の円環面の一方に圧電体としての圧電セラミック1
0を貼り合わせて振動体12を構成している。13は耐
磨耗性材料の摩擦材、14は弾性体であり、互いに貼り
合わせて移動体15を構成している。移動体15は、摩
擦材13を介して振動体12と接触している。圧電セラ
ミック10に電界を印加すると振動体12の周方向に曲
げ振動の進行波が励起され、移動体15を駆動する。尚
、同図中の矢印は移動体15の回転方向を示す。FIG. 3 is a perspective view of a conventional ultrasonic motor, in which a piezoelectric ceramic 1 as a piezoelectric body is attached to one of the annular surfaces of an elastic body 11.
The vibrating body 12 is constructed by pasting together the 0 pieces. 13 is a friction material made of a wear-resistant material, and 14 is an elastic body, which are pasted together to form a moving body 15. The moving body 15 is in contact with the vibrating body 12 via the friction material 13. When an electric field is applied to the piezoelectric ceramic 10, a traveling wave of bending vibration is excited in the circumferential direction of the vibrating body 12, thereby driving the movable body 15. Note that the arrow in the figure indicates the rotation direction of the moving body 15.
第4図は第3図の超音波モータに使用した圧電セラミッ
ク10の電極構造の一例を示している。FIG. 4 shows an example of the electrode structure of the piezoelectric ceramic 10 used in the ultrasonic motor of FIG.
同図では円周方向に9波の弾性波がのるようにしである
。同図において、AおよびBはそれぞれ2分の1波長相
当の小領域から成る電極群で、Cは4分の3波長、Dは
4分の1波長の長さの電極である。電極CおよびDは電
極群AとBに位置的に4分の1波長(=90度)の位相
差を作っている。電極AとB内の隣り合う小電極部は互
いに反対に厚み方向に分極されている。圧電セラミック
10の弾性体11との接着面は、第4図に示めされた面
と反対の面であり、電極はベタ電極である。使用時には
、電極群AおよびBは第4図に斜線で示されたように、
それぞれ短絡して用いられる。In the figure, nine elastic waves are placed in the circumferential direction. In the figure, A and B are electrode groups each consisting of a small area corresponding to a half wavelength, C is an electrode group having a length of three-quarters of a wavelength, and D is an electrode having a length of a quarter of a wavelength. Electrodes C and D create a positional phase difference of 1/4 wavelength (=90 degrees) between electrode groups A and B. Adjacent small electrode portions in electrodes A and B are polarized oppositely to each other in the thickness direction. The bonding surface of the piezoelectric ceramic 10 with the elastic body 11 is the surface opposite to the surface shown in FIG. 4, and the electrode is a solid electrode. In use, electrode groups A and B are arranged as indicated by diagonal lines in FIG.
They are used by short-circuiting each.
以上のように構成された超音波モータの圧電セラミック
10の電極AおよびBに、
V x−Voxsin(ωt) −−−
(1)V 2−V OXC05(ωt)
−−−(2)ただし、vo:電圧の瞬時値
ω:角周波数
t:時間
で表される電圧v1およびv2をそれぞれ印加すれば、
振動体12には、
ξ−ξox(cos(ωt)xcos(kx)+5in
(ωt)xsin(kx))
−vo Xcos(ωt−kx) −−−(
2)ただし ξ:曲げ振動の振幅値
ξ0:曲げ振動の瞬時値
k :波数(2π/λ)
λ:波長
X :位置
で表せる、円周方向に進行する曲げ撮動の進行波が励起
される。In the electrodes A and B of the piezoelectric ceramic 10 of the ultrasonic motor configured as above, V
(1) V2-VOXC05(ωt)
---(2) However, if vo: instantaneous value of voltage ω: angular frequency t: voltages v1 and v2 expressed in time are applied,
The vibrating body 12 has ξ−ξox(cos(ωt)xcos(kx)+5in
(ωt)xsin(kx)) -vo Xcos(ωt-kx) ---(
2) However, ξ: amplitude value of bending vibration ξ0: instantaneous value of bending vibration k: wave number (2π/λ) λ: wavelength .
第5図は振動体12の表面のA点が進行波の励起によっ
て、長軸2 w 、短軸2uの楕円運動をし、振動体1
2上に加圧して設置された移動体15が、楕円の頂点近
傍で接触することにより、摩擦力により波の進行方向と
は逆方向にV−ωxuの速度で運動する様子を示してい
る。FIG. 5 shows that point A on the surface of the vibrating body 12 moves in an ellipse with the major axis 2w and the minor axis 2u due to the excitation of the traveling wave, and the vibrating body 1
The moving body 15 placed under pressure on the ellipse 2 contacts the ellipse near the apex and moves at a speed of V-ωxu in a direction opposite to the direction of wave propagation due to frictional force.
発明が解決しようとする問題点
超音波モータの出力を大きくするためには、撮動体の持
っている運動エネルギーを大きくすればよい。運動エネ
ルギーは振動体の質量と速度の2乗に比例するので、振
動体の質量または速度を増やせば出力を増加できる。尚
、上記速度Vは、振動体12の曲げ振動の瞬時値ξ0に
比例し、曲げ振動の瞬時値ξ0は、振動体12を構成す
る圧電セラミック10に流れる電流値に比例するため、
小さな電圧で大きな電流が得られる振動体12の共振周
波数近傍で駆動すれば、大きな速度が得られ、超音波モ
ータの出力を大きくすることができる。しかし、超音波
モータの共振周波数は負荷によって変動するため、低ト
ルク出力時では、駆動周波数が共振周波数近傍からずれ
ていても、起動しやすいが、高トルク出力時では、駆動
周波数が共振周波数近傍からずれていると、起動しに(
いという問題点がある。Problems to be Solved by the Invention In order to increase the output of the ultrasonic motor, it is sufficient to increase the kinetic energy of the imaging object. Since kinetic energy is proportional to the square of the mass and speed of the vibrating body, the output can be increased by increasing the mass or speed of the vibrating body. Note that the speed V is proportional to the instantaneous value ξ0 of the bending vibration of the vibrating body 12, and the instantaneous value ξ0 of the bending vibration is proportional to the current value flowing through the piezoelectric ceramic 10 forming the vibrating body 12.
By driving near the resonance frequency of the vibrating body 12 where a large current can be obtained with a small voltage, a large speed can be obtained and the output of the ultrasonic motor can be increased. However, the resonant frequency of an ultrasonic motor varies depending on the load, so when outputting low torque, it is easy to start even if the driving frequency deviates from the vicinity of the resonant frequency, but when outputting high torque, the driving frequency is close to the resonant frequency. If it deviates from the starting point (
There is a problem with this.
本発明はかかる点に鑑みてなされたもので、出力するト
ルクに拘らず安定した起動ができ、しがも効率の良い超
音波モータを提供することを目的としている。The present invention has been made in view of the above problems, and an object of the present invention is to provide an ultrasonic motor that can be stably started regardless of the output torque and is highly efficient.
問題点を解決するための手段
出力させるトルクに応じて、動作時の印加電圧に対する
起動時の印加電圧の高さを制御する超音波モータの駆動
法を用いる。Means for Solving the Problems An ultrasonic motor driving method is used in which the height of the applied voltage at startup with respect to the applied voltage during operation is controlled in accordance with the output torque.
作 用
出力させるトルクに応じて、動作時の印加電圧に対して
、起動時の印加電圧を高くすることによって、高トルク
出力時でも、起動しやすく、効率の良い安定した超音波
モータの駆動ができる。By increasing the applied voltage at startup compared to the applied voltage during operation according to the torque to be output, it is easy to start, and efficient and stable ultrasonic motor drive can be achieved even when high torque is output. can.
実施例
以下、図面に従って本発明の一実施例について詳細な説
明を行う。EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第1図は本発明の一実施例である超音波モータ駆動回路
のブロック図である。超音波モータの起動信号を発する
起動制御部1は、発振器2に接続されており、発振器2
の出力は、一方で90度移相器3を介して、外部からの
信号により増幅率を変化させることができる電圧制御増
幅器A4に、他方では電圧制御増幅器B5に接続されて
いる。FIG. 1 is a block diagram of an ultrasonic motor drive circuit according to an embodiment of the present invention. A starting control unit 1 that issues a starting signal for the ultrasonic motor is connected to an oscillator 2.
The output of is connected via a 90-degree phase shifter 3 to a voltage-controlled amplifier A4 whose amplification factor can be changed by an external signal, and to a voltage-controlled amplifier B5 on the other hand.
電圧制御増幅器A4の出力側は、抵抗R16を介して超
音波モータの駆動体を構成する圧電セラミック10に印
加され、電圧制御増幅器B5の出力側は、抵抗R27を
介して上記圧電セラミック10に印加される。また、抵
抗R16の両端では差動増幅器A7の2つの入力側と接
続しており、差動増幅器A7の出力側は電圧制御増幅器
A4に接続している。同様に、抵抗R28の両端では差
動増幅器B9の2つの入力側に接続しており、差動増幅
器B9の出力側は電圧制御増幅器B5に接続している。The output side of the voltage control amplifier A4 is applied to the piezoelectric ceramic 10 constituting the driver of the ultrasonic motor via a resistor R16, and the output side of the voltage control amplifier B5 is applied to the piezoelectric ceramic 10 via a resistor R27. be done. Further, both ends of the resistor R16 are connected to two input sides of a differential amplifier A7, and the output side of the differential amplifier A7 is connected to a voltage control amplifier A4. Similarly, both ends of the resistor R28 are connected to two input sides of a differential amplifier B9, and the output side of the differential amplifier B9 is connected to a voltage-controlled amplifier B5.
第2図(a)は、トルクの変化に対する、第1図に於け
る抵抗R1及び抵抗R2に流れる電流の変化を表してお
り、第2図(b)は、トルクの変化に対する差動増幅器
A?、及び差動増幅器B9の出力信号を表している。FIG. 2(a) shows the change in the current flowing through the resistor R1 and resistor R2 in FIG. 1 in response to a change in torque, and FIG. 2(b) shows the change in the current flowing through the differential amplifier A in response to a change in torque. ? , and the output signal of differential amplifier B9.
第1図に於いて、上記起動制御部1から起動信号が発せ
られると、上記発振器2から駆動周波数の信号が発せら
れる。ここで、上、記信号は2分割され、一方は上記9
0度移相器3を通り、上記電圧制御増幅器A4によって
、上記超音波モータを駆動する電圧に昇圧される。他方
、該信号は上記電圧制御増幅器B5によって、上記電圧
に昇圧される。更に、上記電圧制御増幅器A4から発せ
られた信号は上記抵抗R16を通って、上記圧電セラミ
ック10に印加される。ここで、第2図(a)に示した
ように、上記抵抗R16を流れる電流が出力するトルク
によって変化した場合、上記差動増幅器A7が上記電流
の変化を検出し、上記電圧制御増幅器A4に信号を発す
る。該信号によって、上記電圧制御増幅器A4の出力が
変化し、第2図(b)に示したように、起動時にはSl
、駆動時にはS2のような電圧が圧電セラミック10に
印加される。同様に、上記抵抗R28を流れる電流が出
力するトルクによって変化した場合、上記差動増幅器B
9が上記電流の変化を検出し、上記電圧制御増幅器B5
に信号を発する。該信号によって、上記電圧制御増幅器
B5の出力が変化し、第2図(b)に示したように、起
動時にはSl、駆動時にはS2のような電圧が圧電セラ
ミック10に印加される。以上のような超音波モータの
駆動制御法により、出力させるトルクに応じて起動時の
印加電圧が変化するため、高トルク出力時でも、安定し
、かつ効率良く駆動ができる。In FIG. 1, when the activation control section 1 generates a activation signal, the oscillator 2 generates a driving frequency signal. Here, the above signal is divided into two, one being the above 9
The voltage passes through the 0 degree phase shifter 3 and is boosted by the voltage control amplifier A4 to a voltage that drives the ultrasonic motor. On the other hand, the signal is boosted to the voltage by the voltage control amplifier B5. Furthermore, the signal issued from the voltage controlled amplifier A4 is applied to the piezoelectric ceramic 10 through the resistor R16. Here, as shown in FIG. 2(a), when the current flowing through the resistor R16 changes due to the output torque, the differential amplifier A7 detects the change in the current, and the voltage control amplifier A4 detects the change in the current. emit a signal. This signal changes the output of the voltage control amplifier A4, and as shown in FIG. 2(b), at startup, Sl
, a voltage such as S2 is applied to the piezoelectric ceramic 10 during driving. Similarly, if the current flowing through the resistor R28 changes depending on the output torque, the differential amplifier B
9 detects the change in the current, and the voltage control amplifier B5
send a signal to. This signal changes the output of the voltage control amplifier B5, and as shown in FIG. 2(b), voltages such as Sl during startup and S2 during driving are applied to the piezoelectric ceramic 10. With the drive control method for the ultrasonic motor as described above, the applied voltage at startup changes depending on the torque to be output, so that stable and efficient drive is possible even when high torque is output.
発明の効果
本発明によれば、高トルク出力時でも、安定した効率の
良い超音波モータを提供できる。Effects of the Invention According to the present invention, it is possible to provide an ultrasonic motor that is stable and efficient even when outputting high torque.
第1図は本発明の一実施例における超音波モータの駆動
法を用いた駆動回路のブロック図、第2斜視図、第4図
は第3図の超音波モータに用いた圧電セラミックの形状
及び、電極構造を示す平面図、第5図は超音波モータの
動作原理の説明図である。
1・・・・・・起動制御部、2・・・・・・発振器、3
・・・・・・90度移相器、4・・・・・・電圧制御増
幅器A、5・・・・・・電圧制御増幅器B、6・・・・
・・抵抗R1,7・・・・・・差動増幅器A、8・・・
・・・抵抗R2,9・・・・・・差動増幅器B、10・
・・・・・圧電セラミック、11・・・・・・弾性体、
12・・・・・・振動体、13・・・・・・摩擦材、1
4・・・・・・弾性体、15・・・・・・移動体。
代理人の氏名 弁理士 中尾敏男 ほか1名第1図
第2図
第3図
第4図
5tIJ体の直ff’7簡Fig. 1 is a block diagram and a second perspective view of a drive circuit using an ultrasonic motor driving method according to an embodiment of the present invention, and Fig. 4 shows the shape and shape of the piezoelectric ceramic used in the ultrasonic motor of Fig. 3. , a plan view showing the electrode structure, and FIG. 5 is an explanatory diagram of the operating principle of the ultrasonic motor. 1... Start-up control section, 2... Oscillator, 3
...90 degree phase shifter, 4...Voltage control amplifier A, 5...Voltage control amplifier B, 6...
...Resistor R1, 7...Differential amplifier A, 8...
... Resistor R2, 9... Differential amplifier B, 10.
...Piezoelectric ceramic, 11...Elastic body,
12... Vibrating body, 13... Friction material, 1
4...Elastic body, 15...Moving body. Name of agent: Patent attorney Toshio Nakao and one other person Figure 1 Figure 2 Figure 3 Figure 4 5tIJ font ff'7
Claims (1)
構成される振動体に弾性進行波を励振することにより、
該振動体上に接触して設置された移動体を移動させる超
音波モータの駆動法において、出力させるトルクに応じ
、動作時の印加電圧に対して、起動時の印加電圧の高さ
を制御することを特徴とする超音波モータの駆動法。By driving a piezoelectric body with an alternating current voltage and exciting an elastic traveling wave in a vibrating body composed of the piezoelectric body and an elastic body,
In a method of driving an ultrasonic motor that moves a moving body placed in contact with the vibrating body, the height of the applied voltage at startup is controlled in accordance with the torque to be output, with respect to the applied voltage during operation. A method of driving an ultrasonic motor characterized by the following.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62307866A JP2636280B2 (en) | 1987-12-04 | 1987-12-04 | Driving method of ultrasonic motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62307866A JP2636280B2 (en) | 1987-12-04 | 1987-12-04 | Driving method of ultrasonic motor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01148082A true JPH01148082A (en) | 1989-06-09 |
JP2636280B2 JP2636280B2 (en) | 1997-07-30 |
Family
ID=17974106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62307866A Expired - Lifetime JP2636280B2 (en) | 1987-12-04 | 1987-12-04 | Driving method of ultrasonic motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2636280B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02174574A (en) * | 1988-12-23 | 1990-07-05 | Nikon Corp | Driving control circuit for ultrasonic motor |
JP2010183819A (en) * | 2009-02-09 | 2010-08-19 | Panasonic Corp | Driving device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5989585A (en) * | 1982-11-15 | 1984-05-23 | Yoshiaki Komatsu | Auxiliary circuit for starting motor |
-
1987
- 1987-12-04 JP JP62307866A patent/JP2636280B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5989585A (en) * | 1982-11-15 | 1984-05-23 | Yoshiaki Komatsu | Auxiliary circuit for starting motor |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02174574A (en) * | 1988-12-23 | 1990-07-05 | Nikon Corp | Driving control circuit for ultrasonic motor |
JP2010183819A (en) * | 2009-02-09 | 2010-08-19 | Panasonic Corp | Driving device |
US8493006B2 (en) | 2009-02-09 | 2013-07-23 | Panasonic Corporation | Drive unit |
US9197142B2 (en) | 2009-02-09 | 2015-11-24 | Panasonic Intellectual Property Management Co., Ltd. | Drive unit |
Also Published As
Publication number | Publication date |
---|---|
JP2636280B2 (en) | 1997-07-30 |
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