JPH01147342U - - Google Patents

Info

Publication number
JPH01147342U
JPH01147342U JP4202988U JP4202988U JPH01147342U JP H01147342 U JPH01147342 U JP H01147342U JP 4202988 U JP4202988 U JP 4202988U JP 4202988 U JP4202988 U JP 4202988U JP H01147342 U JPH01147342 U JP H01147342U
Authority
JP
Japan
Prior art keywords
substrate
machining liquid
conveyance roller
conveyance
conveys
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4202988U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4202988U priority Critical patent/JPH01147342U/ja
Publication of JPH01147342U publication Critical patent/JPH01147342U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Rollers For Roller Conveyors For Transfer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図及び第2図は、本実施例の正面図及び側
面図、第3図は、他の実施例の正面図、第4図は
従来例を使用した現像装置、第5図は従来例の正
面図である。 1……現像装置、2……現像液、3……基板、
4……現像処理槽、5……バツフア槽、6……水
洗槽、7……搬送ローラ、8……支持板、9……
切欠、10……軸受、11……被膜、12……押
圧ローラ、13……搬送ローラ、14……軸受、
15……縦溝、16……円周溝、17……斜め溝
1 and 2 are a front view and a side view of this embodiment, FIG. 3 is a front view of another embodiment, FIG. 4 is a developing device using a conventional example, and FIG. 5 is a conventional example. FIG. 1...Developing device, 2...Developing solution, 3...Substrate,
4...Development processing tank, 5...Buffer tank, 6...Washing tank, 7...Transport roller, 8...Support plate, 9...
Notch, 10...Bearing, 11...Coating, 12...Press roller, 13...Conveyance roller, 14...Bearing,
15... Vertical groove, 16... Circumferential groove, 17... Diagonal groove.

Claims (1)

【実用新案登録請求の範囲】 基板上に加工液を塗布して加工処理するウエツ
ト処理装置内で基板を支持しつつ搬送する回動自
在な搬送ローラにおいて、 搬送面上に加工液の逃げ溝を備えたことを特徴
とする搬送ローラ。
[Scope of Claim for Utility Model Registration] In a rotatable conveyance roller that supports and conveys a substrate in a wet processing device that applies machining liquid onto the substrate and processes it, an escape groove for the machining liquid is provided on the conveyance surface. A conveyance roller characterized by:
JP4202988U 1988-03-31 1988-03-31 Pending JPH01147342U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4202988U JPH01147342U (en) 1988-03-31 1988-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4202988U JPH01147342U (en) 1988-03-31 1988-03-31

Publications (1)

Publication Number Publication Date
JPH01147342U true JPH01147342U (en) 1989-10-12

Family

ID=31268456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4202988U Pending JPH01147342U (en) 1988-03-31 1988-03-31

Country Status (1)

Country Link
JP (1) JPH01147342U (en)

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