JPH01147342U - - Google Patents
Info
- Publication number
- JPH01147342U JPH01147342U JP4202988U JP4202988U JPH01147342U JP H01147342 U JPH01147342 U JP H01147342U JP 4202988 U JP4202988 U JP 4202988U JP 4202988 U JP4202988 U JP 4202988U JP H01147342 U JPH01147342 U JP H01147342U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- machining liquid
- conveyance roller
- conveyance
- conveys
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 2
- 238000003754 machining Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Rollers For Roller Conveyors For Transfer (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Description
第１図及び第２図は、本実施例の正面図及び側
面図、第３図は、他の実施例の正面図、第４図は
従来例を使用した現像装置、第５図は従来例の正
面図である。
１……現像装置、２……現像液、３……基板、
４……現像処理槽、５……バツフア槽、６……水
洗槽、７……搬送ローラ、８……支持板、９……
切欠、１０……軸受、１１……被膜、１２……押
圧ローラ、１３……搬送ローラ、１４……軸受、
１５……縦溝、１６……円周溝、１７……斜め溝
。
1 and 2 are a front view and a side view of this embodiment, FIG. 3 is a front view of another embodiment, FIG. 4 is a developing device using a conventional example, and FIG. 5 is a conventional example. FIG. 1...Developing device, 2...Developing solution, 3...Substrate,
4...Development processing tank, 5...Buffer tank, 6...Washing tank, 7...Transport roller, 8...Support plate, 9...
Notch, 10...Bearing, 11...Coating, 12...Press roller, 13...Conveyance roller, 14...Bearing,
15... Vertical groove, 16... Circumferential groove, 17... Diagonal groove.
Claims (1)
ト処理装置内で基板を支持しつつ搬送する回動自
在な搬送ローラにおいて、 搬送面上に加工液の逃げ溝を備えたことを特徴
とする搬送ローラ。[Scope of Claim for Utility Model Registration] In a rotatable conveyance roller that supports and conveys a substrate in a wet processing device that applies machining liquid onto the substrate and processes it, an escape groove for the machining liquid is provided on the conveyance surface. A conveyance roller characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4202988U JPH01147342U (en) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4202988U JPH01147342U (en) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01147342U true JPH01147342U (en) | 1989-10-12 |
Family
ID=31268456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4202988U Pending JPH01147342U (en) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01147342U (en) |
-
1988
- 1988-03-31 JP JP4202988U patent/JPH01147342U/ja active Pending
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