JPH01147257U - - Google Patents

Info

Publication number
JPH01147257U
JPH01147257U JP4121988U JP4121988U JPH01147257U JP H01147257 U JPH01147257 U JP H01147257U JP 4121988 U JP4121988 U JP 4121988U JP 4121988 U JP4121988 U JP 4121988U JP H01147257 U JPH01147257 U JP H01147257U
Authority
JP
Japan
Prior art keywords
etching
conveyor
micron
view
spray nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4121988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4121988U priority Critical patent/JPH01147257U/ja
Publication of JPH01147257U publication Critical patent/JPH01147257U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP4121988U 1988-03-30 1988-03-30 Pending JPH01147257U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4121988U JPH01147257U (enrdf_load_html_response) 1988-03-30 1988-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4121988U JPH01147257U (enrdf_load_html_response) 1988-03-30 1988-03-30

Publications (1)

Publication Number Publication Date
JPH01147257U true JPH01147257U (enrdf_load_html_response) 1989-10-11

Family

ID=31267661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4121988U Pending JPH01147257U (enrdf_load_html_response) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH01147257U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03255694A (ja) * 1990-03-05 1991-11-14 Airetsukusu:Kk エッチング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5976879A (ja) * 1982-10-26 1984-05-02 Hitachi Chem Co Ltd エツチングマシン

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5976879A (ja) * 1982-10-26 1984-05-02 Hitachi Chem Co Ltd エツチングマシン

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03255694A (ja) * 1990-03-05 1991-11-14 Airetsukusu:Kk エッチング装置

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