JPH01147254U - - Google Patents

Info

Publication number
JPH01147254U
JPH01147254U JP3963388U JP3963388U JPH01147254U JP H01147254 U JPH01147254 U JP H01147254U JP 3963388 U JP3963388 U JP 3963388U JP 3963388 U JP3963388 U JP 3963388U JP H01147254 U JPH01147254 U JP H01147254U
Authority
JP
Japan
Prior art keywords
raw material
container
contact
cvd apparatus
surface level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3963388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0623565Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988039633U priority Critical patent/JPH0623565Y2/ja
Publication of JPH01147254U publication Critical patent/JPH01147254U/ja
Application granted granted Critical
Publication of JPH0623565Y2 publication Critical patent/JPH0623565Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1988039633U 1988-03-28 1988-03-28 Ｃｖｄ装置用原料収納容器 Expired - Lifetime JPH0623565Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988039633U JPH0623565Y2 (ja) 1988-03-28 1988-03-28 Ｃｖｄ装置用原料収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988039633U JPH0623565Y2 (ja) 1988-03-28 1988-03-28 Ｃｖｄ装置用原料収納容器

Publications (2)

Publication Number Publication Date
JPH01147254U true JPH01147254U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-10-11
JPH0623565Y2 JPH0623565Y2 (ja) 1994-06-22

Family

ID=31266133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988039633U Expired - Lifetime JPH0623565Y2 (ja) 1988-03-28 1988-03-28 Ｃｖｄ装置用原料収納容器

Country Status (1)

Country Link
JP (1) JPH0623565Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002083777A (ja) * 2000-05-31 2002-03-22 Shipley Co Llc バブラー
JP2016104912A (ja) * 2002-07-23 2016-06-09 インテグリス・インコーポレーテッド 蒸発器配送アンプル

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7078341B2 (en) * 2003-09-30 2006-07-18 Tokyo Electron Limited Method of depositing metal layers from metal-carbonyl precursors

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888122U (ja) * 1981-12-09 1983-06-15 日立造船株式会社 タンク内液の検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888122U (ja) * 1981-12-09 1983-06-15 日立造船株式会社 タンク内液の検出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002083777A (ja) * 2000-05-31 2002-03-22 Shipley Co Llc バブラー
JP2016104912A (ja) * 2002-07-23 2016-06-09 インテグリス・インコーポレーテッド 蒸発器配送アンプル

Also Published As

Publication number Publication date
JPH0623565Y2 (ja) 1994-06-22

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